Angled sidewalls in silicon slot waveguides: Conformal filling and mode properties

Optics Express

Volumn 17, Issue 23, 2009, Pages 21066-21076

  Saynatjoki A ^a   Alasaarela, T ^a   Khanna, A ^a   Karvonen, L ^a   Stenberg, P ^b   Kuittinen, M ^b   Tervonen, A ^a   Honkanen, S ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CRYSTAL ATOMIC STRUCTURE; DEPOSITION; FILLING;

CONFORMAL FILLING; EFFECTIVE MODE AREAS; FILLING MATERIALS; NONLINEAR EFFECT; OPTICAL MODES; OXIDE MATERIALS; SLOT WAVEGUIDE; WAVEGUIDE PARAMETER;

WAVEGUIDES;

EID: 70749142291     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.021066     Document Type: Article

References (33)

1. M. Lipson, "Guiding, modulating, and emitting light on silicon - challenges and opportunities," J. Lightwave Technol. 23, 4222 (2005).
2. G. T. Reed, "The optical age of silicon," Nature 427, 595 (2004).
3. T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
4. S. Afshar V. and T. M.. Monro, "A full vectorial model for pulse propagation, in emerging waveguides with subwavelength structures part I: Kerr nonlinearity," Opt. Express 17, 2298-2318 (2009).
5. Q. Xu, V.R. Almeida, R.R. Panepucci, and M. Lipson, "Experimental demonstration of guiding and confining light in. nanometer-size low-refractive-index material," Opt. Lett. 29, 1626 (2004).
6. Rong Sun, Po Dong, Ning-ning Feng, Ching-yin Hong, Jürgen Michel, Michal Lipson, and Lionel Kimerling, "Horizontal single and multiple slot waveguides: optical transmission at λ=1550 nm," Opt. Express 15, 17967-17972 (2007).
7. N. Daldosso and L. Pavesi, "Nanosilicon photonics", Laser & Photon. Rev., 1-27 (2009).
8. N.-N. Feng, R. Sun, L. C. Kimerling, and J. Michel, "Lossless strip-to-slot waveguide transformer," Opt. Lett. 32, 1250-1252 (2007).
9. G. Wang, T. Baehr-Jones, M. Hochberg, and A. Scherer, "Design and fabrication of segmented, slotted waveguides for electro-optic modulation", Appl. Phys. Lett. 91, 143109 (2007).
10. E. Jordana, J.M. Fedeli, P. Lyan, J.P. Colonna, P.E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, T. Cuesta-Soto, P. Sanchis, "Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications," Group IV Photonics, 2007 4th IEEE International Conference on paper ThC3.
11. T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q optical resonators in silicon-on-insulatorbased slot waveguides," Appl. Phys. Lett. 86, 081101 (2005).
12. R.L. Puurunen, "Surface chemistry of atomic layer deposition: A. case study for the trimethylaluminum/water process," J. Appl. Phys. 97, 121301 (2005).
13. 5 as a Novel Fluorine Source", Chem. Mater. 20, 5023-5028 (2008).
14. P. Müllner, R. Hainberger, "Optical characteristics of V-groove waveguide structures," Proc. SPIE 7220, 722004 (2009).
15. P. Sanchis, J. Blasco, A. Martinez, J. Marti, "Design, of Silicon-Based Slot Waveguide Configurations for Optimum. Nonlinear Performance," J. Lightwave Technol. 25, 1298-1305 (2007).
16. F. Dell'Olio and V. M. Pássaro, "Optical sensing by optimized silicon slot waveguides," Opt. Express 15, 4977-4993 (2007).
17. A. Säynätjoki, L. Karvonen, A. Khanna, T. Alasaarela, A. Tervonen, S. Honkanen, "Silicon, slot waveguides for nonlinear optics," Proc. SPIE 7212, 72120T (2009).
18. R. Adair, L.L. Chase, and S.A. Payne, "Nonlinear refractive index of optical crystals," Phys. Rev. B 39, 3337-3350 (1989).
19. T. Alasaarela, A. Säynätjoki, T. Hakkarainen, S. Honkanen, "Feature size reduction of silicon slot waveguides by partial filling using atomic layer deposition", Opt. Eng. 48, 080502 (2009).
20. C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, "Nonlinear silicon-on-insulator waveguides for all-optical signal processing," Opt. Express 15, 5976-5990 (2007).
21. C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude and J. Leuthold, "All-optical high-speed signal processing with silicon-organic hybrid slot waveguides," Nat. Photonics 3, 216-219 (2009).
22. B. Esembeson, M.. L. Scimeca , T. Michinobu, F. Diederich, I. Biaggio, "A high-optical quality supramolecular assembly for third-order integrated nonlinear optics," Adv. Mater. 20,4584-4587 (2008).
23. S. Morino, T. Yamashita, K. Horie, T. Wada, H. Sasabe, "Third-order nonlinear optical properties of aromatic polyisoimides", Reactive and Functional Polymers 44, 183-188 (2000).
24. M. Putkonen, J. Harjuoja, T. Sajavaara and L. Niinistö, "Atomic layer deposition of polyimide thin films", J. Mater. Chem., 17, 664-669 (2007).
25. Y. Guo, K. S. Chiang, H. Li, Nonlinear photonics, (Springer).
26. M. E. Lines, "Influence of d orbitais on the nonlinear optical response of transparent transition-metal oxides," Phys. Rev. B. 43, 11978-11990 (1991).
27. A. Major, F. Yoshino, I. Nikolakakos, J. Stewart Aitchison, and P. W. E. Smith, "Dispersion of the nonlinear refractive index in sapphire," Opt. Lett. 29, 602-604 (2004).
28. R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tártara, J. Yu, V. Degiorgio, E. Jordana, J. M.. Fedeli, and L. Pavesi, "Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm", Opt. Express 17, 3941-3950 (2009).
29. FimmWave 5.1, November 2008, PhotonDesign Ltd.; www.photond.com.
30. A. Gondarenko, S. Preble, J. Robinson, L. Chen, H. Lipson, and M. Lipson, "Spontaneous Emergence of Periodic Patterns in a Biologically Inspired Simulation of Photonic Structures," Phys. Rev. Lett. 96, 143904 (2006).
31. 3+ Waveguides With 5.4-dB Optical Gain," IEEE J. Quantum Electron. 45, 454-461 (2009).
32. M. Tiitta, L. Niinistö, "Volatile Metal beta-Diketonates: ALE and CVD precursors for electroluminescent device thin films," Chem. Vap. Deposition 3, 167-182 (1997).
33. Jacob T. Robinson, Kyle Preston, Oskar Painter, and Michal Lipson, "First-principle derivation of gain in highindex-contrast waveguides," Opt. Express 16, 16659-16669 (2008).