Optical characteristics of V-groove waveguide structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7220, Issue , 2009, Pages

  M̈ullner, Paul ^a   Hainberger, Rainer ^a  

^a AIT AUSTRIAN INSTITUTE OF TECHNOLOGY   (Austria)

Author keywords

Anisotropic etching; Optical waveguides; Slot waveguides; SOI

Indexed keywords

COUPLED WIRES; GEOMETRY PARAMETER; LIGHT CONFINEMENTS; LOW INDEX MATERIALS; MONOCRYSTALLINE SILICON; NANOPHOTONIC STRUCTURES; NONLINEAR OPTICAL EFFECTS; OPTICAL CHARACTERISTICS; PHOTONIC WIRES; SLOT WAVEGUIDES; SOI; SURFACE SENSING; TRAPEZOIDAL CROSS SECTIONS; V-GROOVE; WAVEGUIDE GEOMETRY; WAVEGUIDE STRUCTURE; WAVEGUIDING STRUCTURES;

ANISOTROPY; INTEGRATED OPTOELECTRONICS; NANOPHOTONICS; OPTICAL WAVEGUIDES; PHOTONIC DEVICES; WAVEGUIDES; WIRE;

ANISOTROPIC ETCHING;

EID: 66749132881     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.809042     Document Type: Conference Paper

References (18)

1. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure," Opt. Lett. 29, 1209-1211 (2004).
2. Q. Xu, A. R. Vilson, R. R. Panepucci, and M. Lipson, "Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index-matrial," Opt. Lett. 29, 1626-1628 (2004).
3. C. A. Barrios, "Ultrasensitive nanomechanical photonic sensor based on horizontal slot-waveguide resonator," IEEE Photon. Technol. Lett. 18, 2419-2421 (2006).
4. P. Muellner, and R. Hainberger, "Structural optimization of Silicon-On-Insulator Slot waveguides," IEEE Photon. Technol. Lett. 18, 2557-2559 (2006).
5. G. Pennelli, and Piotto M., "Fabrication and characterization of silicon nanowires with triangular cross section," Journal of Applied Physics 100 , 0545071-0545079 (2006).
6. G. Pennelli, and B. Pellegrini "Fabrication of silicon nanostructures by geometry controlled oxidation," Journal of Applied Physics 101, 1045021-1045028 (2007).
7. K. Tiefenthaler and W. Lukosz, "Sensitivity of grating couplers as intergrated-optical chemical sensors," J. Opt. Soc. Am. B 6, 209-220 (1998).
8. R. G. Heidemann, G. J. Veldhuis, E. W. H. Jager, and P. V. Lambeck, "Fabrication and packaging of integrated chemo-optical sensors," Sensors and Actuators B, 35, 234-240 (1996).
9. F. Prieto, B. Sepulveda, A. Calle, A. Llobera, C. Dominguez, A. Abad, A. Montoya, and L. M. Lechuga, "An integrated optical interferometric nanodevice based on silicon technology for biosensor applications," Nanotechnology 14, 907-912 (2003).
10. A. Densmore, D.-X. Xu, S. Janz, P. Waldron, T. Mischki, G. Lopinski, A. Delge, J. Lapointe, P. Cheben, B. Lamontagne, and J. H. Schmid, "Spiral-path high-sensitivity silicon photonic wire molecular sensor with temperature-independent response," Opt. Lett. 33, 596-598 (2008).
11. F. Dell'Olio, and V. M. N. Passaro, "Optical sensing by optimized silicon slot waveguides," Opt. Express 15, 4977-4993 (2007).
12. C. A. Barrios, K. B. Gylfason, B. Sanchez, A. Griol, H. Sohlstroem, M. Holgado, and R. Casquel, "Slotwaveguide biochemical sensor," Opt. Lett. 32, 3080-3082 (2007).
13. O. Parriaux, and G. J. Veldhuis, "Normalized analysis for the sensitivity optimization of integrated optical evanescent-wave sensors," Journal of Lightwave Technology 16, 573-582 (1998).
14. Comsol, Femlab 3.1.0.163, April 2005, FEMLAB GmbH, Berliner Str. 4, 37073 Goettingen, Germany.
15. C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, "Nonlinear silicon-on-insulator for all-optical signal processing," Opt. Express , 15, 5976-5990, (2007).
16. C. Koos, P. Vorreau, P. Dumon, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, "Highly-nonlinear silicon photonics slot waveguide," OFC 2008 Proceeding, PDP25 (2008).
17. R. Hainberger and P. Muellner, "Nonlinearity of optimzed horizontal slot waveguides," LEOS Winter Topicals Proceedings of the IEEE, to be published (2009).
18. J. T. Robinson, K. Preston, O. Painter, and Michal Lipson, "First-principle derivation of gain in high-indexcontrast waveguides," Opt. Express , 16, 16659-16669 (2008).