Numerical simulation of hydrocarbon plasmas for nanoparticle formation and the growth of nanostructured thin films

Plasma Physics and Controlled Fusion

Volumn 51, Issue 12, 2009, Pages

  Neyts, Erik ^a   Eckert, Maxie ^a   Mao, Ming ^a   Bogaerts, Annemie ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE PLASMA; HYDROCARBON SPECIES; MOLECULAR DYNAMICS SIMULATIONS; NANOCRYSTALLINE DIAMONDS; NANOPARTICLE FORMATION; NANOSTRUCTURED THIN FILM; NUMERICAL SIMULATION; PLASMA MODEL;

ACETYLENE; DIAMOND FILMS; FLUORINE CONTAINING POLYMERS; LIGHTING; MOLECULAR DYNAMICS; NANOPARTICLES; ORGANIC COMPOUNDS; SIMULATORS; THIN FILMS;

PLASMAS;

EID: 70450277324     PISSN: 07413335     EISSN: 13616587     Source Type: Journal    
DOI: 10.1088/0741-3335/51/12/124034     Document Type: Article

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