SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 407, Issue 1-2, 2002, Pages 18-25

Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

(4) Hiramatsu, Mineo a Lau, Chi Hian b Bennett, Andrew b Foord, John S b

a MEIJO UNIVERSITY (Japan)

b UNIVERSITY OF OXFORD (United Kingdom)

Author keywords

Chemical vapor deposition (CVD); Diamond; Field emission

Indexed keywords

DIAMONDS; ELECTRIC PROPERTIES; ELECTRON EMISSION; GRAPHITE; MICROWAVES; MIXTURES; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES;

FIELD EMISSION;

DIAMOND FILMS;

EID: 0037155427 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00006-8 Document Type: Conference Paper

Times cited : (26)

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