X-ray photoelectron spectromicroscopy of doped silicon patterns

AIP Conference Proceedings

Volumn 1173, Issue , 2009, Pages 99-103

  Barrett, N ^a   Lavayssiere M ^b   Zagonel, L F ^a   Bailly, A ^b   Renault, O ^b  

^a CEA SACLAY   (France)

^b CEA GRENOBLE   (France)

Author keywords

Core level; Photoelectron spectroscopy; Silicon doped; Spectromicroscopy; Synchrotron radiation; Valence band; Work function; XPEEM

Indexed keywords

EID: 70450260771     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3251269     Document Type: Conference Paper

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