Energy-filtered Photoelectron Emission Microscopy (EF-PEEM) for imaging nanoelectronic materials

AIP Conference Proceedings

Volumn 931, Issue , 2007, Pages 502-506

  Renault, Olivier ^a   Chabli, Amal ^a  

^a CEA LETI   (France)

Author keywords

Copper; Energy filter; Imaging; PEEM; Photoelectron emission microscopy; Work function; XPS

Indexed keywords

EID: 35348830354     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2799425     Document Type: Conference Paper

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