Influence of post-annealing temperature on properties of Ta-doped znO transparent conductive films

Chinese Physics Letters

Volumn 26, Issue 11, 2009, Pages

  Cao, Feng ^a   Wang, Yi Ding ^a   Yin, Jing Zhi ^a   Cong, Meng Long ^a   Han, Liang Yu ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; OPTICAL FILMS; OPTICAL PROPERTIES; SUBSTRATES; TANTALUM COMPOUNDS; X RAY DIFFRACTION; ZINC OXIDE;

DOPED ZNO; ELECTRICAL AND OPTICAL PROPERTIES; GLASS SUBSTRATES; MORPHO-LOGICS; POSTANNEALING TEMPERATURES; PROPERTY; R.F. SPUTTERING; RF-SPUTTERING; TA DOPED ZNO; TRANSPARENT CONDUCTIVE FILMS;

ANNEALING;

EID: 70450233831     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/26/11/114203     Document Type: Article

References (22)

1. Hsu Y F, Xi Y Y, Yip C T, Djuriić A B and Chan W K 2008 J. Appl. Phys. 103 083114
2. Zhu L, Fan Y Q, Zhao M C, Wu M, Zhang J Y, Xu C X and Cui Y P 2009 Chin. Phys. Lett. 26 018401
3. Sundqvist P A, Zhao Q X and Willander M 2003 Phys. Rev. B 68 155334
4. Saxena V, Aswal D K, Kaur M, Koiry S P, Gupta S K, Yakhmi J V, Kshirsagar R J and Deshpande S K 2007 Appl. Phys. Lett. 90 043516
5. Cao Q, Deng J X, Liu G L, Chen Y X, Yan S S and Mei L M 2007 Chin. Phys. Lett. 24 2951
6. Wang M, Lee K E, Hahn S H, Kim E J, Kim S, Chung J S, Shin E W and Park C 2007 Mater. Lett. 61 1118
7. Park S M, Ikegami T and Ebihara K 2006 Thin Solid Films 513 90
8. Yan J F, Zhao L L and Zhang Z Y 2008 Chin. Phys. Lett. 25 2253
9. Zhao G L, Lin B X, Hong L, Meng X D and Fu Z X 2004 Chin. Phys. Lett. 21 1381
10. Agashe C, Kluth O, Hupkes U, Zastrow U and Rech B 2007 J. Appl. Phys. 101 083705
11. Khranovskyy V, Grossner U, Lazorenko V, Lashkarev G, Svensson B G and Yakimova R 2007 Superlattice Microst. 42 379
12. Lee J H and Song J T 2008 Thin Solid Films 516 1377
13. Horwat D and Billard A 2007 Thin Solid Films 515 5444
14. Hong R J, Jiang X, Szyszka B, Sitteinger V and Pflug A 2002 Appl. Surf. Sci 207 341
15. Yu X H, Ma J, Ji F, Wang Y F, Zhang X J, Cheng C F and Ma H L 2005 Appl. Surf. Sci. 239 222
16. Kim J H, Ahn B D, Kim C H, Jeon K A, Kang H S and Lee S Y 2008 Thin Solid Films 516 1330
17. Gomeza H, Maldonadoa A, Olvera M L and Acosta D R 2005 Sol. Energy Mater. Sol. C 87 107
18. Gonçalves G, Elangovan E, Barquinha P, Pereira L, Martins R and Fortunato E 2007 Thin Solid Films 515 8562
19. Jeong S H and Boo J H 2004 Thin Solid Films 447 105
20. Xing G Z, Yao B, Cong C X, Yang T, Xie Y P, Li B H and Shen D Z 2008 J. Alloys Compd. 457 36
21. Burstein E 1954 Phys. Rev. 93 632
22. Lee H W, Lau S P, Wang Y G, Tse K Y, Hng H H and Tay B K 2004 J. Cryst. Growth 268 596