High speed force-volume mapping using atomic force microscope

Proceedings of the American Control Conference

Volumn , Issue , 2009, Pages 991-996

  Kim, Kyong Soo ^a   Wang, Haiming ^a   Zou, Qingze ^a  

^a Iowa State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVERSE EFFECT; ATOMIC FORCE MICROSCOPES; CONTROL APPROACH; DYNAMIC EVOLUTION; FORCE MAPPING; FORCE-VOLUME; HIGH-SPEED; ITERATIVE CONTROL; ITERATIVE LEARNING CONTROL; POLYDIMETHYLSILOXANE PDMS; SCANNING PROBE MICROSCOPE; SIGNAL DECOUPLING; TEMPORAL ERRORS;

LEARNING ALGORITHMS; LEARNING SYSTEMS; MEASUREMENT ERRORS; SILICONES; SPEED;

MAPPING;

EID: 70449657755     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2009.5160641     Document Type: Conference Paper

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