Recipe-independent indicator for tool health diagnosis and predictive maintenance

IEEE Transactions on Semiconductor Manufacturing

Volumn 22, Issue 4, 2009, Pages 522-535

  Chen, Argon ^a   Blue, Jakey ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Advanced equipment control (AEC); Fault detection and classification (FDC); Predictive maintenance (PM); Tool health monitoring

Indexed keywords

ADVANCED EQUIPMENT CONTROL (AEC); FAULT DETECTION AND CLASSIFICATION; FAULT DETECTION AND CLASSIFICATION (FDC); HEALTH DIAGNOSIS; PREDICTIVE MAINTENANCE; PREDICTIVE MAINTENANCE (PM); PROCESS CAPABILITIES; PROCESS ENGINEER; TOOL CONDITION; TOOL PARAMETER; WAFER PROCESSING;

ELECTRIC CONTROL EQUIPMENT; ELECTRIC NETWORK TOPOLOGY; FAULT DETECTION; HEALTH; INTEGRATED CIRCUITS; MAINTENANCE; STRUCTURES (BUILT OBJECTS);

TOOLS;

EID: 70449481962     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2009.2028215     Document Type: Conference Paper

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