An unsupervised diagnosis for process tool fault detection: The flexible golden pattern

IEEE Transactions on Semiconductor Manufacturing

Volumn 20, Issue 4, 2007, Pages 355-363

  Lacaille, Jérǒme ^a   Zagrebnov, Maxim ^a  

^a PDF Solutions   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABNORMAL BEHAVIORS; PARAMETER SETTINGS; PATENTED TECHNOLOGIES; PROCESS BEHAVIORS; PROCESS TOOLS; SEMICONDUCTOR PROCESSING; SIGNAL TRACES; WAFER PRODUCTIONS;

FAULT DETECTION; FEATURE EXTRACTION; PATENTS AND INVENTIONS;

ALGORITHMS;

EID: 64149130391     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2007.907608     Document Type: Article

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