Weighted principal component analysis and its applications to improve FDC performance

Proceedings of the IEEE Conference on Decision and Control

Volumn 4, Issue , 2004, Pages 4262-4267

  Yue, H Henry ^a,b   Tomoyasu, Masayuki ^a  

^a TOKYO ELECTRON LTD   (Japan)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PLASMA ETCHING; PROBLEM SOLVING; SENSORS; SIGNAL TO NOISE RATIO;

FAULT DETECTION AND CLASSIFICATION (FDC); MODEL JUMPS; PLASMA LEAKAGE; PLASMA LEAKAGE FAULTS;

PRINCIPAL COMPONENT ANALYSIS;

EID: 14244262619     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: 10.1109/cdc.2004.1429421     Document Type: Conference Paper

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