Real-time equipment health evaluation and dynamic preventive maintenance

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue 1, 2000, Pages 375-378

  Chen, Argon ^a   Guo, R S ^a   Wu, G S ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Condition based PM; Multivariate analysis; Real time equipment monitoring

Indexed keywords

CONDITION MONITORING; DATA REDUCTION; ENGINEERS; HEALTH; MARKOV PROCESSES; MATRIX ALGEBRA; PREVENTIVE MAINTENANCE; PROCESS ENGINEERING; REAL TIME SYSTEMS;

HEALTH INDEX;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034583773     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Evaluation of triant modelware/rt sematech β-site
2. Advanced fault detection for the semiconductor industry
3. Real-time process monitoring
4. Optimal replacement policy and the structure of software for condition-based maintenance