Boron doped amorphous carbon thin films grown by r.f. PECVD under different partial pressure

Diamond and Related Materials

Volumn 14, Issue 11-12, 2005, Pages 1799-1804

  Podder, J ^a,b   Rusop, M ^a   Soga, T ^a   Jimbo, T ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b BANGLADESH UNIVERSITY OF ENGINEERING AND TECHNOLOGY   (Bangladesh)

Author keywords

Amorphous carbon film; Optical properties; r.f. plasma CVD; Raman spectroscopy

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); FOURIER TRANSFORM INFRARED SPECTROSCOPY; METHANE; RAMAN SCATTERING; ULTRAVIOLET SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON THIN FILMS; CARRIER GASES;

CARBON;

EID: 27744442737     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.07.020     Document Type: Conference Paper

References (19)

1. W. Kulisch Deposition of Super Hard Diamond Like Materials 1999 Springer Heidelberg
2. S. Anders, D.L. Callahan, G.M. Pharr, T.Y. Tsui, and C.S. Bhatia Surf. Coat. Technol. 94-95 1997 189
3. S.R.P. Silva, S. Xu, B.K. Tay, H.S. Tan, and W.I. Milne Appl. Phys. Lett. 69 1996 491
4. K. Miyoshi, R.L.C. Wu, and A. Garscadden Surf. Coat. Technol. 54-55 1992 428
5. M. Ishihara, M. Suzuki, T. Watanabe, O. Tsuda, T. Nakamura, A. Tanaka, and Y. Koga Diam. Relat. Mater. 13 2004 1449
6. V.S. Veerasamy, G.A.J. Amaratunga, A.A. Davis, A.E. Timbs, W.I. Miline, and D.R. Mackenzie J. Phys., Condens. Matter 5 1993 169
7. K. Latha, V. Prasad, and S.V. Subramanyam Carbon 41 2003 1841
8. T. Soga, T. Kokuda, Y. Hayashi, and T. Jimbo Thin Solid Films 482 2005 86
9. X.M. Tian, M. Rusop, Y. Hayashi, T. Soga, T. Jimbo, and M. Umeno Mol. Cryst. Liq. Cryst. 386 2002 73
10. W. Chan, T. Allen, and F. Gaspari Mater. Res. Soc. Symp. Proc. 498 1998 165
11. B. Dischler Proceedings of Materials Research Society Symposia, Pittsburgh 1987 189
12. F.L. Freire Jr., and D.F. Francheschini Thin Solid Films 293 1997 236
13. R.O. Dillon, J.A. Woollam, and V. Katkanant Phys. Rev., B Condens. Matter 29 1984 3482
14. J. Robertson Diam. Relat. Mater. 12 2003 79
15. Y. Tanabe, G. Burkhard, T. Ishikura, K. Tsunoda, H. Hasuo, M. Tamura, H. Tamura, A. Sawaoka, and K. Uematsu Jpn. J. Appl. Phys. 33 1994 6684
16. J. Robertson Mater. Sci. Eng., R Rep. 37 2002 129
17. J.F. Moulder, W.F. Srickle, P.E. Sobol, and K.D. Bomben J. Chastain Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics, Eden Prairie 1992 522
18. J. Tauc, R. Grigorovici, and A. Vancu Phys. Status Solidi 15 1996 627
19. J. Tauc Amorphous and Liquid Semiconductors 1974 Plenum Press London Chap 4.