Subwavelength nanolithography based on unidirectional excitation of surface plasmons

Journal of Optics A: Pure and Applied Optics

Volumn 11, Issue 8, 2009, Pages

  Xu, Ting ^a   Fang, Liang ^a   Zeng, Beibei ^a   Liu, Yao ^a   Wang, Changtao ^a   Feng, Qin ^a   Luo, Xiangang ^a  

^a INSTITUTE OF OPTICS AND ELECTRONICS   (China)

Author keywords

Interference; Optical lithography; Surface plasmon

Indexed keywords

COUNTERPROPAGATING; FABRICATION METHOD; FINITE DIFFERENCE TIME DOMAIN ANALYSIS; FREE-SPACE DIFFRACTIONS; INCIDENT LIGHT; INTERFERENCE; OPERATING WAVELENGTH; OPTICAL LITHOGRAPHY; SIMULATION RESULT; SUB-WAVELENGTH; SURFACE PLASMON; SURFACE PLASMON WAVES; SURFACE PLASMONS;

FINITE DIFFERENCE TIME DOMAIN METHOD; LIGHT; NANOLITHOGRAPHY; OPTICAL DATA STORAGE; PHOTOLITHOGRAPHY; PLASMONS;

TIME DOMAIN ANALYSIS;

EID: 70449380401     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/11/8/085003     Document Type: Article

References (13)

1. Chou S Y, Krauss P R and Renstrom P J 1996 Imprint lithography with 25-nanometer resolution Science 272 85-7
2. Dhaliwal R S et al 2001 PREVAIL-electron projection technology approach for next-generation lithography IBM J. Res. Dev. 45 615-38
3. Cooper E B, Manalis S R, Fang H, Dai H, Matsumoto K, Minne S C, Hunt T and Quate C F 1999 Terabit-per-square-inch data storage with the atomic force microscope Appl. Phys. Lett. 75 3566-8 (Pubitemid 129564715)
4. Yin X, Fang N, Zhang X, Maartini I B and Schwartz B J 2002 Near-field two-photon nanolithography using an apertureless optical probe Appl. Phys. Lett. 81 3663-5
5. Luo X and Ishihara T 2004 Surface plasmon resonant interference nanolithography technique Appl. Phys. Lett. 84 4780-2
6. Liu Z W, Wei Q H and Zhang X 2005 Surface plasmon interference nanolithography Nano Lett. 5 957-61
7. Derouard M, Hazart J, Lerondel G, Bachelot R, Adam P and Royer P 2007 Polarization-sensitive printing of surface plamson interferences Opt. Express 15 4238-46
8. López-Tejeira F et al 2007 Efficient unidirectional nanoslit couplers for surface plasmons Nat. Phys. 3 324-8
9. López-Tejeira F et al 2008 Modulation of surface plasmon coupling-in by one-dimensional surface corrugation New J. Phys. 10 033035
10. Yee K S 1966 Nurmerical solution of initial boundary value problems involving Maxwell's equations in isotropic media IEEE Trans. Antennas Propag. 14 302
11. Raether H 1988 Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Berlin: Springer) chapter 1 pp4-5
12. Xu T, Du C, Wang C and Luo X 2007 Subwavelength imaging by metallic slab lens with nanoslits Appl. Phys. Lett. 91 201501
13. Weber M J 2003 Handbook of Optical Materials (Boston, MA: CRC Press) chapter 4 pp326-7