Micro fabrication of stainless steel micro components using soft moulding and aqueous slurry

Microelectronic Engineering

Volumn 87, Issue 1, 2010, Pages 72-78

  Imbaby, Mohamed ^a   Jiang, Kyle ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Dispersant; Micro parts; Sintering; Stainless steel

Indexed keywords

AQUEOUS SLURRIES; DISPERSANT; DISPERSANTS; FABRICATION PROCESS; FORMING GAS; HIGH QUALITY; IN-VACUUM; LINEAR SHRINKAGE; METALLIC SLURRY; MICRO PARTS; MICRO-COMPONENTS; SINTERED DENSITY; SINTERING ATMOSPHERES; SINTERING CONDITION;

CORROSION RESISTANT ALLOYS; FABRICATION; MICROOPTICS; MOLDING; MOLDS; PHOTORESISTS; SHRINKAGE; SINTERING; SURFACE ROUGHNESS; VACUUM;

STAINLESS STEEL;

EID: 70350745345     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.05.025     Document Type: Article

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