Indexed keywords
ASPECT RATIO;
ELECTRON BEAMS;
ELECTRON GUNS;
ELECTRON OPTICS;
ELECTRONICS INDUSTRY;
ELECTROPLATING;
GOLD;
IMAGING TECHNIQUES;
METALLIZING;
MICROELECTRONICS;
OPTICAL DESIGN;
OPTICAL INSTRUMENTS;
PARTICLE BEAMS;
PHOTORESISTS;
FRESNEL ZONE PLATES;
HARD X-RAY IMAGING;
HIGH ASPECT RATIO;
SOFT X-RAY;
ELECTRON BEAM LITHOGRAPHY;
ELECTRONS;
ELECTROPLATING;
GOLD;
LITHOGRAPHY;
1
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Phase zone plates for X-rays and the extreme UV.
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1
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