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Volumn 14, Issue 9-11, 2008, Pages 1251-1255

Fabrication of fresnel zone plates with high aspect ratio by soft X-ray lithography

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRON BEAMS; ELECTRON GUNS; ELECTRON OPTICS; ELECTRONICS INDUSTRY; ELECTROPLATING; GOLD; IMAGING TECHNIQUES; METALLIZING; MICROELECTRONICS; OPTICAL DESIGN; OPTICAL INSTRUMENTS; PARTICLE BEAMS; PHOTORESISTS;

EID: 49949083625     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0542-7     Document Type: Conference Paper
Times cited : (12)

References (14)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.