The fabrication of stainless steel parts for MEMs

Materials Research Society Symposium - Proceedings

Volumn 687, Issue , 2002, Pages 149-154

  Garino, Terry J ^a   Morales, Alfredo ^a   Buchheit, Thomas ^a   Boyce, Brad ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSIFICATION; EPOXY RESINS; INJECTION MOLDING; PLASTIC CASTINGS; PLASTIC MOLDS; POLYMETHYL METHACRYLATES; PYROLYSIS; RUBBER MOLDS; SCANNING ELECTRON MICROSCOPY; SILICONES; SINTERING; STAINLESS STEEL;

MICRO-MOLDING PROCESS; MOLD FILLING; PRECISE DIMENSIONAL TOLERANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036351577     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)