Colloidal lithography-based fabrication of suspended nanoporous silicon nitride membranes

Microchimica Acta

Volumn 167, Issue 1, 2009, Pages 135-140

  Zhang, Xuan ^a   Zhu, Zaiwen ^a   Sun, Chunfeng ^a   Zhu, Feng ^a   Luo, Zhongzi ^a   Yan, Jiawei ^a   Mao, Bingwei ^a  

^a XIAMEN UNIVERSITY   (China)

Author keywords

Biosensor; Colloidal lithography; Nanopores; Silicon nitride suspended membranes

Indexed keywords

EID: 70350705819     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-009-0216-5     Document Type: Article

References (26)

1. Suzuki H, Takeuchi S (2008) Microtechnologies for membrane protein studies. Analytical and Bioanalytical Chemistry 391:2695-2702.
2. Romer W, Steinem C (2004) Impedance analysis and single-channel recordings on nano-black lipid membranes based on porous alumina. Biophysical Journal 86:955-965.
3. Jeon TJ, Malmstadt N, Schmidt JJ (2006) Hydrogel-encapsulated lipid membranes. Journal of the American Chemical Society 128:42-43.
4. Nakane JJ, Akeson M, Marziali A (2003) Nanopore sensors for nucleic acid analysis. Journal of Physics: Condensed Matter 15:R1365-R1393.
5. Bayley H, Cremer PS (2001) Stochastic sensors inspired by biology. Nature 6852:226-230.
6. Han XJ, Studer A, Sehr H, Geissbuhler I, Di Berardino M, Winkler FK et al (2007) Nanopore arrays for stable and functional free-standing lipid bilayers. Advanced Materials 19:4466-4470.
7. Quist AP, Chand A, Ramachandran S, Daraio C, Jin S, Lal R (2007) Atomic force microscopy imaging and electrical recording of lipid bilayers supported over microfabricated silicon chip nanopores: Lab-on-a-chip system for lipid membranes and ion channels. Langmuir 23:1375-1380.
8. Romer W, Lam YH, Fischer D, Watts A, Fischer WB, Goring P et al (2004) Channel activity of a viral transmembrane peptide in micro-BLMs: Vpu(1-32) from HIV-1. Journal of the American Chemical Society 126:16267-16274.
9. Kasianowicz JJ, Brandin E, Branton D, Deamer DW (1996) Characterization of individual polynucleotide molecules using a membrane channel. Proceedings of the National Academy of Sciences of the United States of America 93:13770-13773.
10. Jovanovic-Talisman T, Tetenbaum-Novatt J, McKenney AS, Zilman A, Peters R, Rout MP (2009) Artificial nanopores that mimic the transport selectivity of the nuclear pore complex. Nature 457:1023-1027.
11. Schmitt EK, Vrouenraets M, Steinem C (2006) Channel activity of OmpF monitored in nano-BLMs. Biophysical Journal 91:2163-2171.
12. Goncalves RP, Agnus G, Sens P, Houssin C, Bartenlian B, Scheuring S (2006) Two-chamber AFM: probing membrane proteins separating two aqueous compartments. Nature Methods 3:1007-1012.
13. Dekker C (2007) Solid-state nanopores. Nat Nanotechnol 2:209-215.
14. Storm AJ, Chen JH, Ling XS, Zandbergen HW, Dekker C (2003) Fabrication of solid-state nanopores with single-nanometre precision. Nature Materials 2:537-540.
15. Buchholz K, Tinazli A, Kleefen A, Dorfner D, Pedone D, Rant U et al (2008) Silicon-on-insulator based nanopore cavity arrays for lipid membrane investigation. Nanotechnology 19:6.
16. Storm AJ, Chen JH, Ling XS, Zandbergen HW, Dekker C (2005) Electron-beam-induced deformations of SiO2 nanostructures. Journal of Applied Physics 98:8.
17. Li J, Stein D, McMullan C, Branton D, Aziz MJ, Golovchenko JA (2001) Ion-beam sculpting at nanometre length scales. Nature 412:166-169.
18. Fredriksson H, Alaverdyan Y, Dmitriev A, Langhammer C, Sutherland DS, Zaech M et al (2007) Hole-mask colloidal lithography. Advanced Materials 19:4297-4302.
19. Hanarp P, Sutherland DS, Gold J, Kasemo B (2003) Control of nanoparticle film structure for colloidal lithography. Colloid Surf A-Physicochem Eng Asp 214:23-26.
20. Reimhult E, Kumar K, Knoll W (2007) Fabrication of nanoporous silicon nitride and silicon oxide films of controlled size and porosity for combined electrochemical and waveguide measurements. Nanotechnology 18:275703.
21. Neugebauer S, Stoica L, Guschin D, Schuhmann W (2008) Redox-amplified biosensors based on selective modification of nanopore electrode structures with enzymes entrapped within electrodeposition paints. Mikrochimica Acta 163:33-40.
22. Wang JX, Hu JP, Wen YQ, Song YL, Jiang L (2006) Hydrogen-bonding-driven wettability change of colloidal crystal films: from superhydrophobicity to superhydrophilicity. Chemistry of Materials 28:4984-4986.
23. Zhang WM, Li J, Cao LX, Wang YG, Guo W, Liu KX, Xue JM (2007) Fabrication of nanoporous silicon dioxide/silicon nitride membranes using etched ion track technique. Nucl Instrum Meth B 266:3166-3169.
24. Cheng D, Gosalvez MA, Hori T, Sato K, Shikida M (2006) Improvement in smoothness of anisotropically etched silicon surfaces: Effects of surfactant and TMAH concentrations. Sens Actuator A-Phys 125:415-421.
25. Biswas K, Kal S (2006) Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. Microelectronics Journal 37:519-525.
26. Richter RP, Brisson A (2003) Characterization of lipid bilayers and protein assemblies supported on rough surfaces by atomic force microscopy. Langmuir 19:1632-1640.