MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing

IEEE Sensors Journal

Volumn 9, Issue 12, 2009, Pages 1660-1666

  Fernandez, Renny Edwin ^a   Stolyarova, Sara ^b   Chadha, Anju ^a   Bhattacharya, Enakshi ^a   Nemirovsky, Yael ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Microcantilevers; Polysilicon; Porous silicon; Trygliceride sensor

Indexed keywords

BIOSENSING; BIOSENSING APPLICATIONS; CANTILEVER SENSORS; ENHANCED SENSITIVITY; MICROCANTILEVERS; POROUS LAYERS; POROUS SURFACE; RESONANCE FREQUENCIES; TRYGLICERIDE SENSOR; VAPOR PHASE; WORK FOCUS;

ATOMIC FORCE MICROSCOPY; BIOSENSORS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ENZYME IMMOBILIZATION; MORPHOLOGY; NANOCANTILEVERS; POLYSILICON; RESONANCE; SURFACE MICROMACHINING;

POROUS SILICON;

EID: 70350627385     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2030643     Document Type: Article

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