Enhancement of the sensitivity of pressure sensors with a composite Si/porous silicon membrane

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1605-1610

  Sujatha, L ^a   Bhattacharya, Enakshi ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MEMBRANES; COMPUTER SIMULATION; ELASTIC MODULI; MEMS; PIEZOELECTRIC DEVICES; POROUS SILICON;

CRYSTALLINE SILICON MEMBRANES; PIEZORESISTIVE PRESSURE SENSORS;

PRESSURE SENSORS;

EID: 34547660124     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/025     Document Type: Article

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