|
|
Volumn 392, Issue 1, 2001, Pages 11-15
|
|
Influences of optical emission settings on wear performance of metal-doped diamond-like carbon films deposited by unbalanced magnetron sputtering
|
|
Author keywords
Diamond like carbon; Optical emission monitor; Raman; Wear
|
|
Indexed keywords
CRYSTAL MICROSTRUCTURE;
DOPING (ADDITIVES);
LIGHT EMISSION;
MAGNETRON SPUTTERING;
PHASE TRANSITIONS;
RAMAN SPECTROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
TRIBOLOGY;
TUNING;
VICKERS HARDNESS TESTING;
WEAR OF MATERIALS;
CLOSED-LOOP OPTICAL EMISSION MONITORS;
ELECTRON PROBE MICROANALYSIS;
DIAMOND LIKE CARBON FILMS;
|
|
EID: 0035939539
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)00976-2 Document Type: Article |
|
Times cited : (20)
|
|
References (27)
|
