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Volumn 1, Issue 1-3, 2007, Pages 16-39

Damage mechanics of electromigration in microelectronics copper interconnects

Author keywords

copper interconnects; damage mechanics; electromigration; thin film

Indexed keywords


EID: 70350571503     PISSN: 17450055     EISSN: 17450063     Source Type: Journal    
DOI: 10.1504/ijmsi.2007.013864     Document Type: Article
Times cited : (29)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.