Enhancing parametric sensitivity in electrically coupled MEMS resonators

Journal of Microelectromechanical Systems

Volumn 18, Issue 5, 2009, Pages 1077-1086

  Thiruvenkatanathan, Pradyumna ^a   Yan, Jize ^a   Woodhouse, Jim ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Electrical coupling; Mode localization; Parametric sensitivity; Resonators

Indexed keywords

COMMON-MODE REJECTION; COUPLED OSCILLATIONS; EIGEN STATE; EIGENSTATES; ELECTRICAL COUPLING; ELECTRICALLY TUNABLE; FABRICATION TOLERANCES; FREQUENCY SHIFT; MECHANICAL SENSING; MEMS RESONATORS; MICROELECTROMECHANICAL SYSTEMS; MODE LOCALIZATION; ORDERS OF MAGNITUDE; PARAMETRIC SENSITIVITY; RESONANT FREQUENCIES; SIGNAL SENSITIVITY; SMALL PERTURBATIONS; SPRING CONSTANTS; THEORETICAL STUDY; THREE ORDERS OF MAGNITUDE; VIBRATION MODES;

MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; SENSORS; STIFFNESS; VIBRATING CONVEYORS;

SENSITIVITY ANALYSIS;

EID: 70349995825     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2025999     Document Type: Article

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