Internal phase inversion narrow bandwidth MEMS filter

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 705-708

  Yan, Jize ^a   Seshia, Ashwin A ^a   Phan, Kim Le ^b   Van Beek, Joost T M ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

Filters; MEMS; Narrow bandwidth; Resonators

Indexed keywords

CAPACITIVELY COUPLED; ELECTRICAL SPRING; FILTERS; INTERNAL PHASE; MECHANICAL COUPLING; MEMS FILTER; NARROW BANDWIDTH;

ELECTROMECHANICAL FILTERS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONATORS;

BANDWIDTH;

EID: 67649366659     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0168     Document Type: Conference Paper

References (8)

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