Narrow bandwidth single-resonator MEMS tuning fork filter

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2007, Pages 1366-1369

  Yan, Jize ^a   Seshia, Ashwin A ^a   Phan, Kim L ^b   Steeneken, Peter G ^b   Van Beek, Joost T M ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONATORS; SILICON; TELECOMMUNICATION SYSTEMS; WAVE FILTERS;

EUROPEAN; FREQUENCY CONTROLS; NARROW BANDWIDTH;

TUNING;

EID: 51049114891     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2007.4319300     Document Type: Conference Paper

References (19)

1. L. Lin, R. T. Howe, A. P. Pisano, 'Microelectromechanical Filters for Signal Processing,' J. Microelectromech. Syst., vol. 7, pp. 286-294, 1998.
2. D. Galayko, AKaiser, B. Legrand, L. Buchaillot, C. Combi, D. Collard, 'Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology,' Sensors and Actuators A. vol. 126, pp. 227-240, 2006
3. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, C. T.-C. Nguyen, 'Small percent bandwidth design of a 431-MHz notch-coupled micromechanical hollow-disk ring mixer-filter,' Proceedings, IEEE Int. Ultrasonics Symposium, Sept. 18-21, pp. 1295-1298, 2005.
4. S. Pourkamali, F. Ayazi, 'Electrically coupled MEMS bandpass filters Part I: With coupling element,' Sensors and Actuators A. vol. 122, pp. 307-316, 2005
5. S. Pourkamali, F. Ayazi, 'Electrically coupled MEMS bandpass filters Part II. Without coupling element,' Sensors and Actuators A vol. 122, pp. 317-325, 2005
6. M. U. Demirci and C. T.-C. Nguyen, 'Single-resonator fourthorder micromechanical disk filters,' Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Confi., Jan. 30 - Feb. 3, pp. 207-210, 2005.
7. Mitsuo Nakazawa, Yatsuka Nakamura, Shigemitsu Miyashita, 'Frequency-Temperature Characteristics of Quartz Crystal Flexure Bars and Quartz Crystal Tuning Forks,' IEEE Transactions on Sonics and Ultrasonics, Vol. SU-26, No. 5, 1979, pp. 369-376
8. T. A. Roessig, 'Integrated MEMS Tuning Fork Oscillators for Sensor Applications', PhD thesis, University of Califonia, Berkeley, 1998
9. T. A. Roessig, R. T. Howe, A. P. Pisano, J. H. Smith, 'Surfacemicromachined resonant force sensor', Proceedings of ASME Dynamic Systems and Control Division, pp. 871-876, 1995
10. F. Paoletti, M.-A Gretillat, N. F. de Rooij, 'A silicon micromachined tuning fork gyroscope' IEE Colloquium on Silicon Fabricated Inertial Instruments, London, UK, pp. 3/1-3/6, 2 Dec. 1996
11. R. A. Johnson, 'Mechanical filters in electronics,' John Wiley & Sons, 1983
12. Stephen D. Senturia, Microsystem Design, Kluwer Academic Publishers, 2001
13. C. T.-C. Nguyen, 'Micromechanical Signal Processors,' PhD thesis, Univ. of California, Berkeley, 1994
14. Yu-Wei Lin, Seungbae Lee, Sheng-Shian Li, Yuan Xie, Zeying Ren, Clark T.-C. Nguyen, 'Series-Resonant VHF Micromechanical Resonator Reference Oscillators,' IEEE Journal of Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, 2004
15. D. A Horsley, R. Horowitz and A. P. Pisano, 'Microfabricated Electrostatic Actuators for Hard Disk Drives,' IEEE/ASME Transactions on Mechatronics, Vol. 3, No. 3, pp. 175-183, Sept. 1998.
16. S. Graham Kelly, 'Fundamentals of Mechanical Vibrations, 2nd edition' McGraw-Hill Higher Education, 2000
17. Kaajakari, V, Mattila, T, Oja, A, Seppa, H, 'Nonlinear Limits for Single Crystal Silicon Microresonators', J. Microelectromechanical Systems, vol. 12, no. 12, no. 5, pp. 714-725. 2003
18. L. D. Landau and E. M. Lifshitz, 'Mechanics,' Oxford, 1960
19. M. Agarwal, S. A. Chandorkar, R. N. Candler, B. Kim, M. A. Hopcroft, R. Melamud, C. M. Jha, T. W. Kenny, B. Murmann, 'Optimal drive condition for nonlinearity reduction in electrostatic microresonators,' Applied Physics Letters 89, 214105, 2006.