Silicon nanowire electromechanical switch for logic device application

Materials Research Society Symposium Proceedings

Volumn 1018, Issue , 2007, Pages 117-125

  Li, Qiliang ^a   Koo, Sang Mo ^b   D Edelstein, Monica ^a   Suehle, John S ^a   Richter, Curt A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Kwangwoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER CIRCUITS; ELECTRODES; LOGIC DEVICES; NANOTUBES; NANOWIRES; SILICON;

DEVICE APPLICATION; ELECTROMECHANICAL FORCES; ELECTROMECHANICAL SWITCHES; FABRICATION AND CHARACTERIZATIONS; ON/OFF CURRENT RATIO; REVERSIBLE SWITCHING; SUBTHRESHOLD SLOPE; SWITCHING CHARACTERISTICS;

ELECTROMECHANICAL DEVICES;

EID: 70349935132     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-1018-ee09-07     Document Type: Conference Paper

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