XPS study of early stages of Al/Au interface formation

Surface and Interface Analysis

Volumn 41, Issue 10, 2009, Pages 830-833

  Polyak, Yaroslav ^a   Bastl, Zdeněk ^a  

^a J HEYROVSKÝ INSTITUTE OF PHYSICAL CHEMISTRY   (Czech Republic)

Author keywords

Al au interface; Au(4f) doublet; Liquid nitrogen temperature; Thermodynamic stability; XPS

Indexed keywords

AL/AU INTERFACE; AU(4F) DOUBLET; EXPERIMENTAL CONDITIONS; INTERFACE FORMATION; INTERMETALLIC COMPOUNDS; INTERMETALLIC PHASE; LIQUID NITROGEN TEMPERATURE; POLYCRYSTALLINE SUBSTRATES; THERMAL TREATMENT; XPS;

ATOMIC SPECTROSCOPY; INTERMETALLICS; LIQUID NITROGEN; LIQUIDS; PHASE INTERFACES; SUPERCONDUCTING MATERIALS; TEMPERATURE; THERMODYNAMICS; X RAY PHOTOELECTRON SPECTROSCOPY;

THERMODYNAMIC STABILITY;

EID: 70349820543     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3109     Document Type: Article

References (26)

1. G. G. Harman, Wire Bonding in Microelectronics Materials, Processes, Reliability, Yield, McGraw-Hill: New York, 1997.
2. C. Passagrilli, L. Gobbato, R. Tiziani, Proceedings of the ESREF Conference: Arcachon, France, 2003.
3. N. J. Noolu, N. M. Murdeshwar, K. J. Ely, J. C. Lippold, W. A. Baeslack III, J. Mater. Res. 2004, 19(5), 1374.
4. X. Zhang, T. Y. Tee, Thin Solid Films 2006, 504, 355.
5. S. U. Campisano, G. Foti, E. Ramini, S. S. Lau, J. W. Mayer, Philos. Mag. A 1975, 37, 903.
6. G. Majni, C. Nobili, G. Ottaviani, M. Costato, E. Galli, J. Appl. Phys. 1981, 52, 4047.
7. C. Xu, T. Sritharan, S. G. Mhaisalkar, Thin Solid Films 2007, 515, 5454.
8. C. Xu, T. Sritharan, S. G. Mhalsalkar, Scripta Mater. 2007, 56, 549.
9. J. C. Fuggle, E. Käline, L. M. Watson, D. J. Fabian, Phys. Rev. B 1977, 16, 750.
10. R. Pretorius, C. C. Theron, A. Vantomme, J. V. Mayer, Crit. Rev. Solid State Mater. Sci. 1999, 24(1), 1.
11. H. Piao, N. S. McIntyre, J. Electron Spectrosc. Relat. Phenom. 2001, 119, 29.
12. http://www.phy.cuhk.edu.hk/~surface/XPSPEAK/, [Last accessed 2004].
13. L. P. H. Jeurgens, W. G. Sloof, C. G. Borsboom, F. D. Tichelaar, E. J. Mittemeijer, J. Appl. Surf. Sci. 2000, 161, 139.
14. J. A. Meyer, I. D. Baikie, E. Kopatzki, R. J. Behm, Surf. Sci. 1996, 365, L647.
15. B. Fischer, H. Brune, J. V. Barth, A. Fricke, K. Kern, Phys. Rev. Lett. 1999, 82, 1732.
16. T. Sritharan, Y. B. Li, C. Xu, S. Zhang, J. Mater. Res. 2008, 23(5), 1371.
17. C. Palacio, A. Arranz, Surf. Interface Anal. 1999, 27, 871.
18. A. Arranz, C. Palacio, Surf. Interface Anal. 2000, 29, 392.
19. C. Palacio, A. Arranz, J. Phys. Chem. B 2000, 104, 9647.
20. http://www.chemres.hu/aki/XMQpages/XMQhome.htm, [Last accessed 2006].
21. J. H. Scofield J. Electron Spectrosc. Relat. Phenom. 1976, 8, 129.
22. S. Tanuma, C. J. Powell, D. R. Penn, Surf. Interface Anal. 1994, 21, 165.
23. R. M. Walser, R. W. Bené, Appl. Phys. Lett. 1976, 28, 624.
24. V. I. Dybkov, Powder Metall. Met. Ceram. 1996, 35, 355.
25. R. Pretorius, A. M. Vredenberg, F. W. Saris, R. de Reus, J. Appl. Phys. 1991, 70, 3636.
26. T. Laurila, J. Molarius, Crit. Rev. Solid State Mater. Sci. 2003, 28, 185.