Optical properties of Al2O3 thin films grown by atomic layer deposition

Applied Optics

Volumn 48, Issue 28, 2009, Pages 5407-5412

  Kumar, Pradeep ^a   Wiedmann, Monika K ^b   Winter, Charles H ^b   Avrutsky, Ivan ^a  

^a Wayne State University   (United States)

^b WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC LAYER DEPOSITION; ATOMS; DEPOSITION; GLASS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SUBSTRATES; THIN FILMS; WAVEGUIDES;

GLASS SUBSTRATES; HIGH INDEX CONTRAST; NUMERICAL FITTING; OPTICAL WAVEGUIDING; REFLECTION SPECTRA; SODA LIME GLASS SUBSTRATE; WAVELENGTH RANGES;

OPTICAL FILMS;

EID: 70349675159     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.005407     Document Type: Article

References (26)

1. M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions", IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006).
2. M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, "Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides", Appl. Phys. Lett. 89, 241114 (2006).
3. Y. Vlasov and S. McNab, "Losses in single-mode silicon-oninsulator strip waveguides and bends", Opt. Express 12, 1622-1631 (2004).
4. D. J. Lockwood and L. Pavesi, "Silicon fundamentals for photonics applications", in Silicon Photonics, Vol. 94 of Top. Appl. Phys. (Springer-Verlag, 2004), pp. 1-50.
5. K. Worhoff, P. V. Lambeck, and A. Driessen, "Design, tolerance analysis, and fabrication of silicon oxynitride based planar optical waveguides for communication devices", J. Lightwave Technol. 17, 1401-1407 (1999).
6. P. J. Kelly and R. D. Arnell, "Magnetron sputtering: a review of recent developments and applications", Vacuum 56, 159-172 (2000).
7. A. T. Hunt, W. B. Carter, and J. K. Cochran, Jr., "Combustion chemical vapor deposition: a novel thin-film deposition technique, "Appl. Phys. Lett. 63, 266-268 (1993).
8. R. K. Singh and J. Narayan, "Pulsed-laser evaporation technique for deposition of thin films: Physics and theoretical model", Phys. Rev. B 41, 8843-8859 (1990).
9. S. I. Najafi, T. Touam, R. Sara, M. P. Andrews, and M. A. Fardad, "Sol-gel glass waveguide and grating on silicon", J. Lightwave Technol. 16, 1640-1646 (1998). (Pubitemid 128641287)
10. G. L. Yip and J. Albert, "Characterization of planar optical waveguides by K+-ion exchange in glass", Opt. Lett. 10, 151-153 (1985).
11. E. Langereis, J. Keijmel, M. C. M. van de Sanden, and W. M. M. Kessels, "Surface chemistry of plasma-assisted atomic layer deposition of A1O studied by infrared spectroscopy", Appl. Phys. Lett. 92, 231904 (2008).
12. S. B. S. Heil, P. Kudlacek, E. Langereis, R. Engeln, M. C. M. van de Sanden, and W. M. M. Kessels, "In situ reaction mechanism studies of plasma-assisted atomic layer deposition of A1O", Appl. Phys. Lett. 89, 131505 (2006).
13. M. Thitsa, Y. Song, and S. Albin, "Effect of oxidation, etching, and thin-film deposition on silicon photonic crystals", J. Electrochem. Soc. 155, H351-H356 (2008).
14. 3 films grown by atomic layer deposition", Appl. Phys. Lett. 71, 3604-3606 (1997).
15. R. L. Puurunen, "Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process", J. Appl. Phys. 97, 121301 (2005).
16. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, 1991).
17. E. Palik, Handbook of Optical Constants of Solids (Academic, 1985).
18. M. Rubin, "Optical constants and bulk optical properties of soda lime silica glasses for windows", Sol. Energy Mater. 12, 275-288 (1985).
19. 2", Jpn. J. Appl. Phys. 32, 6137-6140 (1993).
20. 3 as precursors", J. Mater. Chem. 12, 1415-1418 (2002).
21. 3 thin film growth on Si (100) using binary reaction sequence chemistry", Thin Solid Films 292, 135-144 (1997).
22. M. Ritala and M. Leskelä, in Handbook of Thin Film Materials, H. S. Nalwa, ed. (Academic, 2002), Vol. 1, pp. 103-159.
23. H. P. Urbach and G. Rikken, "Spontaneous emission from a dielectric slab", Phys. Rev. A 57, 3913-3930 (1998).
24. J. Seligson, "Prism couplers in guided-wave optics-design considerations", Appl. Opt. 26, 2609-2611 (1987).
25. P. K Tien and R. Ulrich, "Theory of prism-film coupler and thin-film light guides", J. Opt. Soc. Am. 60, 1325-1337 (1970).
26. O. Hidalgo, Y. Berencen, and J. Rodriguez, "Prism coupling characterization of planar optical waveguides made by silver ion exchange in glass", Phys. Status Solidi C 2, 3746 (2005).