Photopatternable conductive PDMS as a new mems material

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 228-231

  Cong, H ^a   Pan, T ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELASTOMERS; FILLED POLYMERS; FLEXIBLE ELECTRONICS; LIGHT SENSITIVE MATERIALS; MEDICAL APPLICATIONS; MEMS; MICROCHANNELS; MICROSYSTEMS; PHOTORESISTS; PHOTOSENSITIVITY; POLYDIMETHYLSILOXANE; SILICONES;

CONDUCTIVE ELASTOMERS; CONDUCTIVE FILLERS; ELECTRICAL CONDUCTIVITY; ELECTRICAL IMPEDANCE; ELECTRICAL SENSING; FLEXIBLE CIRCUIT; PHOTOPATTERNABILITY; POLYDIMETHYLSILOXANE PDMS;

SOLID-STATE SENSORS;

EID: 70349668477     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.60     Document Type: Conference Paper

References (20)

1. S. K. Sia, and G. M. Whitesides, “Microfluidic Devices Fabricated in Poly(dimethyl siloxane) for Biological Studies”, Electrophoresis, 24, 3563 (2003).
2. B. H. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-dimensional Micro-channel Fabrication in Polydimethylsiloxane (PDMS) Elastomer”, JMEMS, 9, 76 (2000).
3. C. Liu, “Recent Developments in Polymer MEMS”, Adv. Mater., 19, 3783 (2007).
4. X. Niu, S. Peng, L. Liu, W. Wen, and P. Sheng, “Characterizing and Patterning of PDMS-Based Conducting Composites”, Adv. Mater., 19, 2682 (2007).
5. A. A. S. Bhagat, P. Jothimuthu, and I. Papautsky, “Photodefinable Polydimethylsiloxane (PDMS) for Rapid Lab-on-a-chip Prototyping”, Lab on a Chip, 7, 1192 (2007)
6. K. Tsougeni, A. Tserepi, and E. Gogolides, “Photosensitive Poly(dimethylsiloxane) Material for Microfluidic Applications”, Microelectronic Engineering, 84, 1104 (2007).
7. “Patternable Silicones for Electronics”, Product Data Sheet, Dow Corning (2005).
8. C. Liu, “Nanocomposite Conductive Elastomer: Microfabrication Processes and Applications in Soft-Matter MEMS Sensors”, Mater. Res. Soc. Symp. Proc., 0947-A07-01 (2007).
9. J. Engel, J. Chen, N. Chen, S. Pandya, and C. Liu, “Muti-walled Carbon Nanotube Filled Conductive Elastomers: Materials and Appilation to Micro Transducers”, IEEE MEMS, 246 (2006).
10. M. A. Unger, H. P. Chou, T. Thorsen, A. Scherer, and S. R. Quake, “Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography”, Science, 288, 113 (2000).
11. V. T. S. Wong, A. Huang, and C. M. Ho, “SU-8 Lift-off Patterned Silicone Chemical Vapor Sensor Arrays”, IEEE MEMS, 754 (2005).
12. A. J. Gawron, R. S. Martin, and S. M. Lunte, “Fabrication and Evaluation of Carbon-based Dual-electrode Detector for Poly(dimethylsiloxane) Electrophoresis Chips”, Electrophoresis, 22, 242 (2001).
13. S. P. Rwei, F. H. Ku, and K. C. Cheng, “Dispersion of Carbon Black in a Continuous Phase: Electrial, Rheological, and Morphological Studies”, Colloid Polym. Sci., 280, 1110 (2002).
14. S. Jiguel, A. Bertsch, H. Hofmann, and P. Renaud, “Conductive SU8 Photoresist for Microfabrication”, Adv. Funct. Mater., 15, 1511 (2005).
15. R. Biller, “AC Conductivity for the Two-dimensional Bond-percolation Problem”, J. Phys., 18, 989 (1985).
16. A. Y. Dovzhenko, and P. V. Zhirkov, “The Effect of Particle Size Distribution on the Formation of Percolation Clusters”, Phys. Lett. A, 204, 247 (1995).
17. R. Zallen, “The Physics of Amorphous Solids”, Wiley, New York (1983).
18. S. Kirkpatrick, “Percolation and Conduction”, Rev. Mod. Phys., 45, 574 (1973).
19. F. Carmona, P. Prudhon, and F. Barreau, “Percolation in Short Fibres Epoxy Resin Composites: Conductivity Behavior and Finite Size Effects near Threshold”, Solid State Commun., 51, 255 (1984).
20. S. Jiguel, A. Bertsch, H. Hofmann, and P. Renaud, “SU8-Silver Photosensitive Nanocomposite”, Adv. Eng. Mater., 6, 719 (2004).