SU-8 lift-off patterned silicone chemical vapor sensor arrays

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 754-757

  Wong, Victor T S ^a   Huang, Adam ^a   Ho, Chih Ming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR SENSORS; ROOM TEMPERATURE VULCANIZING (RTV) POLYMERS;

ACETONE; CARBON BLACK; CHEMICAL SENSORS; MICROMACHINING; SILICON WAFERS; SILICONES; VULCANIZATION;

ARRAYS;

EID: 26844454907     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2005.1454039     Document Type: Conference Paper

References (11)

1. M.C. Lonergan, E.J. Severin, B.J. Doleman, S.A. Beaber, R.H. Grubbs, and N.S. Lewis, "Array-Based Vapor Sensing Using Chemically Sensitive, Carbon Black-Polymer Resistors", Chemistry of Materials, Vol. 8, pp. 2298-2312 (1996).
2. H.T. Nagle, R. G.-Osuna, and S.S. Schiffman, "The How and Why of Electronic Noses", IEEE Spectrum, Vol. 35, No. 9, pp. 22-31 (1998).
3. M.E. Koscho, R.H. Grubbs, and N.S. Lewis, "Properties of Vapor Detector Arrays Formed through Plasticization of Carbon Black - Organic Polymer Composite", Analytical Chemistry, Vol. 74, pp. 1307 - 1315 (2002).
4. E.J. Severin, B.J. Doleman, and N.S. Lewis, "An Investigation of the Concentration Dependence and Response to Analyte Mixtures of Carbon Black/Insulating Organic Polymer Composite Vapor Detectors", Analytical Chemistry, Vol. 72, pp. 658 -668 (2000).
5. J.A. Dickson, M.S. Freund, N.S. Lewis, R.M. Goodman, "An Integrated Chemical Sensor Arrays Using Carbon Black Polymers and a Standard CMOS Process", in Technical Digest of the Solid-State Sensor and Actuator Workshop, Hilton Head 2000, pp. 162 - 165 (2000).
6. F. Zee and J.W. Judy, "Micromachined Polymer-based Chemical Gas Sensor Array", Sensors and Actuators B, Vol. 72, pp. 120-128 (2001).
7. K.S. Ryu, X. Wang, K. Shaikh, and C. Liu, "A Method of Precision Patterning of Silicone Elastomer and Its Applications", Journal of Microelectromechanical Systems, Vol. 13, No. 4, pp. 568 - 575 (2004).
8. T.S. Wong and A. Huang, US Patent Pending (2004).
9. J.W. Gardner, "Detection of Vapors and Odours from a Multisensor Array Using Pattern Recognition, Part 1. Principal Component and Cluster Analysis", Sensors and Actuators B, Vol. 4, pp.109 -115 (1991).
10. S.M. Briglin and N.S. Lewis, "Characterization of the Temporal Response Profile of Carbon Black-Polymer Composite Detectors to Volatile Organic Vapors", Journal of Physical Chemistry B, Vol. 107, pp.11031 -11042 (2003).
11. V.T.S. Wong, A. Huang, and C.M. Ho, "Towards High-Density Silicone Polymeric Chemical Vapor Sensor Arrays for Electronic Nose Applications", in preparation.