Controlled dust formation in pulsed rf plasmas

Journal of Applied Physics

Volumn 106, Issue 6, 2009, Pages

  Berndt, J ^a   Kovacevic E ^a   Stefanovic I ^b,c   Boufendi, L ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED DISCHARGES; DUST FORMATION; DUST PARTICLE; FREQUENCY REGIONS; NARROW FREQUENCY BAND; PULSE FREQUENCIES; PULSED DISCHARGE; RF PLASMA; SIMPLE MODEL;

ACETYLENE; ARGON; FREQUENCY BANDS; LIGHTING;

DUST;

EID: 70349634926     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3224874     Document Type: Article

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