Stress and structural studies of ZnO thin films on polymer substrate under different RF powered conditions

Materials Letters

Volumn 63, Issue 29, 2009, Pages 2597-2599

  Liu, Yun yan ^a,b   Zang, Yong li ^b   Wei, Gong xiang ^b   Li, Jiao ^b   Fan, Xiao Ling ^b   Cheng, Chuan fu ^a  

^a SHANDONG NORMAL UNIVERSITY   (China)

^b SHANDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Mechanical properties; Microstructure; Semiconductors; Thin films

Indexed keywords

FLEXIBLE SUBSTRATE; GRAIN SIZE; MECHANICAL STRESS; POLYMER SUBSTRATE; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; SEMICONDUCTORS; STRUCTURAL STUDIES; TEFLON SUBSTRATE; XRD ANALYSIS; ZNO FILMS; ZNO THIN FILM;

BIOLOGICAL MATERIALS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; METALLIC FILMS; MICROSTRUCTURE; POLYMER FILMS; RESIDUAL STRESSES; SEMICONDUCTING ZINC COMPOUNDS; THIN FILMS; ZINC OXIDE;

SUBSTRATES;

EID: 70349484917     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2009.08.027     Document Type: Article

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