Deposition of ZnO thin film on polytetrafluoroethylene substrate by the magnetron sputtering method

Materials Letters

Volumn 61, Issue 23-24, 2007, Pages 4463-4465

  Liu, Yun yan ^a   Yuan, Yu zhen ^a   Gao, Xu tuan ^a   Yan, Shi shen ^b   Cao, Xin zhong ^a   Wei, Gong xiang ^a  

^a SHANDONG UNIVERSITY OF TECHNOLOGY   (China)

^b SHANDONG UNIVERSITY   (China)

Author keywords

Electronic materials; Magnetron sputtering; Nano crystal ZnO; Polytetrafluoroethylene (Teflon); Thin films

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYTETRAFLUOROETHYLENES; X RAY DIFFRACTION; ZINC OXIDE;

DIELECTRIC STRENGTH; ELECTRONIC MATERIALS;

THIN FILMS;

EID: 34548044471     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2007.02.020     Document Type: Article

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