Hydrogen-containing amorphous carbon layers as optical materials in the Near-IR spectral range

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Hertwig, Andreas ^a   Krürger, Jörg ^a   Weis, Matthias ^a   Beck, Uwe ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Amorphous; Diamond like carbon; Hydrocarbons; Laser ablation; Optical properties; Structure

Indexed keywords

ABSORPTION CONSTANT; AMORPHOUS; AMORPHOUS CARBON LAYER; DAMAGE MORPHOLOGY; DAMAGE THRESHOLD; DIAMOND-LIKE CARBON; ECR PLASMA SOURCE; HYDROGENATED AMORPHOUS CARBON; NEAR-IR; PLASMA-CVD; RF PLASMA; SPECTRAL RANGE; STRUCTURE; SUB-STRUCTURES; SUBSTRATE BIAS; THIN LAYERS; VARIOUS SUBSTRATES; VISIBLE SPECTRAL RANGE;

ABSORPTION; CHEMICAL PROPERTIES; CHEMICAL VAPOR DEPOSITION; HYDROCARBONS; HYDROGEN; LASER ABLATION; LASERS; MECHANICAL PROPERTIES; PLASMA SOURCES; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES;

AMORPHOUS CARBON;

EID: 70349435482     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730406     Document Type: Conference Paper

References (36)

1. VDI 2840, Guideline: Carbon Films - Basic Knowledge, Film Types and Properties, Beuth-Verlag: Berlin, 2005.
2. J. Robertson, Mater. Sci. Eng. 2002, R 37, 129.
3. D. Klaffke, U. Beck, Tribotest 2001, 8, 57.
4. T. Som, M. Malhotra, V. Kulkarni, S. Kumar, Phys. B 2005, 355.
5. J. Lee, R. W. Collins, V. S. Veerasamy, J. Robertson, J. Non-Cryst. Solids 1998, 230, 617.
6. J. Lee, R. W. Collins, V. S. Veerasamy, J. Robertson, Diamond Relat. Mater. 1998, 7, 999.
7. J. A. Zapien, R. W. Collins, New Diamond Front. Carbon Technol. 2003, 14, 129.
8. W. J. Li, Y. H. Song, Y. H. Yu, X. Wang, S. C. Zou, J. Appl. Phys. 2003, 94, 284.
9. F. W. Smith, J. Appl. Phys. 1984, 55, 764.
10. F. W. Smith, Mater. Sci. Forum 1989, 52, 323.
11. S. Logothetidis, Thin Solid Films 2005, 482, 9.
12. A. Grigonis, Ž. Rutkuniene, V. Kopustinskas, G. J. Babonas, A. Reza, VACUUM 2005, 78, 593.
13. D. L. Wood, J. Tauc, Phys. Rev. B 1972, 5, 3144.
14. G. Jellison, Jr., F. A. Modine, Appl. Phys. Lett. 1996, 69, 371.
15. J. Robertson, Semicond. Sci. Technol. 2003, 18, S12.
16. D. Franta, I. Ohlídal, V. Buršíková, L. Zajíčková, Thin Solid Films 2004, 455, 393.
17. D. Franta, I. Ohlídal, V. Buršíková, L. Zajíčková, Diamond Relat. Mater. 2003, 12, 1532.
18. D. Franta, L. Zajíčková, V. Buršíková, I. Ohlídal, Acta Phys. Slov. 2003, 53, 373.
19. M. Lenzner, J. Krüger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, Phys. Rev. Lett. 1998, 80, 4076.
20. M. Lenzner, Int. J. Mod. Phys. B 1999, 13, 1559.
21. V. G. Ralchenko, T. V. Kononenko, T. Foursova, E. N. Loubnin, V. E. Strelnitsky, J. Seth, S. V. Babu, Diamond Relat. Mater. 1993, 2, 211.
22. G. Dumitru, V. Romano, H. P. Weber, S. Pimenov, T. Kononenko, M. Sentis, J. Hermann, S. Brunéau, Appl. Surf. Sci. 2004, 222, 226.
23. T. V. Kononenko, V. G. Ralchenko, I. I. Vlasov, S. V. Garnov, V. I. Konov, Diamond Relat. Mater. 1998, 7, 1623.
24. U. Beck, G. Reiners, M. Weise, J. Strümpfel, J. Hartung, E. Reinhold, SVC 47th Annual Technical Conference Proceedings 2004, Society of Vacuum Coaters: Albuquerque, NM, USA, p. 86.
25. K. H. Ecker, U. Reinholz, M. Volbracht, H. P. Weise, Nucl. Instrum. Methods Phys. Res., Sect. B 1998, 137, 1277.
26. S. Prawer, K. W. Nugent, Y. Lifshitz, G. D. Lempert, E. Grossman, J. Kulik, I. Avigal, R. Kalish, Diamond Relat. Mater. 1996, 5, 433.
27. G. Daminelli, S. Pentzien, A. Hertwig, J. Krüger, Appl. Phys. A 2006, 83, 89.
28. S. Martin, A. Hertwig, M. Lenzner, J. Krüger, W. Kautek, Appl. Phys. A 2003, 77, 883.
29. A. Hertwig, S. Martin, J. Krüger, W. Kautek, Appl. Phys. A 2004, 79, 1075.
30. P. Koidl, C. Wild, B. Dischler, J. Wagner, M. Ramsteiner, Mater. Sci. Forum 1991, 52, 41.
31. M. A. Tamor, W. C. Vassell, K. R. Carduner, Appl. Phys. Lett. 1991, 58, 592.
32. C. Oppedisano, A. Tagliaferro, Appl. Phys. Lett. 1999, 75, 3650.
33. J. M. Liu, Opt. Lett 1982, 7, 196.
34. N. Yasumaru, K. Miyazaki, J. Kiuchi, Appl. Phys. A 2004, 79, 425.
35. T. Kononenko, S. Pimenov, V. Kononenko, E. Zavedeev, V. Konov, G. Dumitru, V. Romano, Appl. Phys. A 2004, 79, 543.
36. K. Sokolowski-Tinten, W. Ziegler, D. von der Linde, M. P. Siegal, D. L. Overmyer, Appl. Phys. Lett. 2005, 86, 121911.