메뉴 건너뛰기




Volumn 2, Issue , 2003, Pages 1711-1713

A 100 V-IC for the remote powering and control of a microrobot using an electrostatic ciliary motion system

Author keywords

Amplitude modulation; Circuits; Collision mitigation; Control systems; Electrostatic actuators; Frequency; Motion control; Receiving antennas; Testing; Voltage

Indexed keywords

ACTUATORS; AMPLITUDE MODULATION; ANTENNAS; CONTROL SYSTEMS; DEGREES OF FREEDOM (MECHANICS); ELECTRIC POTENTIAL; ELECTROMAGNETIC INDUCTION; ELECTROSTATICS; MICROSYSTEMS; MOTION CONTROL; NETWORKS (CIRCUITS); RECEIVING ANTENNAS; REMOTE CONTROL; SOLID-STATE SENSORS; TESTING; TRANSDUCERS;

EID: 70349291148     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217114     Document Type: Conference Paper
Times cited : (3)

References (10)
  • 1
    • 0034997011 scopus 로고    scopus 로고
    • Application of MEMS to industrial inspection
    • M. Takeda, "Application of MEMS to industrial inspection", Proc. of MEMS'01, 2001, pp. 182-91.
    • Proc. of MEMS'01, 2001 , pp. 182-191
    • Takeda, M.1
  • 2
    • 0028427450 scopus 로고
    • Microrobot actuated by a vibration energy field
    • T. Yasuda, I. Shimoyama and H. Miura, "Microrobot actuated by a vibration energy field", Sensors and Actuators A, vol. 43, 1994, pp. 366-370.
    • (1994) Sensors and Actuators A , vol.43 , pp. 366-370
    • Yasuda, T.1    Shimoyama, I.2    Miura, H.3
  • 6
    • 0027876248 scopus 로고
    • Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
    • dec.
    • M. Ataka, A. Omodaka, N Takeshima and H. Fujita, "Fabrication and operation of polyimide bimorph actuators for a ciliary motion system", JMEMS, vol. 2, no4, dec. 1993, pp. 146-50.
    • (1993) JMEMS , vol.2 , Issue.4 , pp. 146-150
    • Ataka, M.1    Omodaka, A.2    Takeshima, N.3    Fujita, H.4
  • 8
    • 0035982566 scopus 로고    scopus 로고
    • Process and realization of a 3D gold electroplated antenna on a flexible epoxy film for a wireless micro motion system
    • P. Basset, A. Kaiser, D. Collard and L. Buchaillot, "Process and realization of a 3D gold electroplated antenna on a flexible epoxy film for a wireless micro motion system", J. of Vaccum Science and Technology B, vol. 20, no 4, 2002, pp. 1465-70.
    • (2002) J. of Vaccum Science and Technology B , vol.20 , Issue.4 , pp. 1465-1470
    • Basset, P.1    Kaiser, A.2    Collard, D.3    Buchaillot, L.4
  • 9
    • 33947410239 scopus 로고    scopus 로고
    • A 32bit 100V switching array IC ready-to-use for everyone through multi-chip foundry service
    • B. Stefanelli, Y. Mita, A. Kaiser, and H. Fujita, "A 32bit 100V switching array IC ready-to-use for everyone through multi-chip foundry service", Proc. of Transducer'99, 1999, pp. 822-23.
    • Proc. of Transducer'99, 1999 , pp. 822-823
    • Stefanelli, B.1    Mita, Y.2    Kaiser, A.3    Fujita, H.4
  • 10
    • 0031098222 scopus 로고    scopus 로고
    • Scratch Drive Actuator With Mechanical Links for Self-Assembly of Three-Dimensional MEMS
    • T. Akiyama, D. Collard, and H. Fujita, "Scratch Drive Actuator With Mechanical Links for Self-Assembly of Three-Dimensional MEMS", JMEMS, vol.6,1997, pp. 10-17.
    • (1997) JMEMS , vol.6 , pp. 10-17
    • Akiyama, T.1    Collard, D.2    Fujita, H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.