The relationship between contact resistance and contact force on Au-coated carbon nanotube surfaces under low force conditions

IEEE Transactions on Components and Packaging Technologies

Volumn 32, Issue 3, 2009, Pages 650-657

  Yunus, Esa M ^a   McBride, John W ^a   Spearing, Simon M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Au multiwalled carbon nanotubes; Carbon nanotubes; Contact resistance; Nanoindentation apparatus

Indexed keywords

APPLIED FORCES; AU FILM; AU/MULTIWALLED CARBON NANOTUBES; COATED SURFACE; CONTACT FORCES; CONTACT THEORY; ELECTRICAL CONTACTS; EXPERIMENTAL CONDITIONS; FORCE CONDITIONS; MULTI-WALLED; MULTI-WALLED CNT; PLANAR SURFACE; REPEATED LOADING; SILICON SUBSTRATES; VERTICALLY ALIGNED;

CONTACT RESISTANCE; ELECTRIC CONTACTS; GOLD; NANOINDENTATION;

CARBON NANOTUBES;

EID: 70349241508     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2009.2014964     Document Type: Article

References (24)

1. R. A. Coutu, P. E. Kladitis, K. D. Leedy, and R. L. Crane, "Selecting metal alloy electric contact materials for MEMS switches," J. Micromech. Microeng., no. 14, pp. 1157-1164, 2004.
2. D. Gao, M. B. J. Wijesundara, C. Carraro, C. W. Low, R. T. Howe, and R. Maboudian, "High modulus polycrystalline 3C-SiC technology for RF MEMS," in Proc. 12th Int. Conf. Solid State Sens., Actuators Microsyst., 2003, pp. 1160-1163, 3D3.4.
3. G. D. Lian, E. C. Dickey, M. Ueno, and M. K. Sunkara, "Ru-doped nanostructured carbon films," Diamond Rel. Mater., vol. 11, pp. 1890-1896, 2002.
4. O. Yaglioglu, A. J. Hart, R. Martens, and A. H. Slocum, "Method of characterizing electrical contact properties of carbon nanotube coated surfaces," Rev. Sci. Instrum., vol. 77, pp. 095105/1-095105/3, 2006.
5. M. F.Yu,O. Lourie, M. J. Dyer,K.Moloni, T. F.Kelly, and R. S. Ruoff, "Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load," Science, vol. 287, no. 5453, pp. 637-640, 2000.
6. E. W. Wong, P. E. Sheehan, and C. M. Lieber, "Nanobeam mechanics: Elasticity, strength, and toughness of nanorods and nanotubes," Science, vol. 277, pp. 1971-1975, 1997.
7. H. J. Qi, K. B. K. Teo, K. K. S. Lau, M. C. Boyce, W. I. Milne, J. Robertson, and K. K. Gleason, "Determination of mechanical properties of carbon nanotubes and vertically aligned carbon nanotube forests using nanoindentation," J. Mech. Phys. Solids, vol. 51, pp. 2213-2237, 2003.
8. E. T. Thostenson, Z. Ren, and T. W. Chou, "Advances in the science and technology of carbon nanotubes and their composites: A review," Composites Sci. Technol., vol. 61, pp. 1899-1912, 2001.
9. O. Hjortstam, P. Isberg, S. Soderholm, and H. Dai, "Can we achieve ultra-low resistivity in carbon nanotube-based metal composites?," J. Appl. Phys. A, Mater. Sci. Process., vol. 78, pp. 1175-1179, 2004.
10. D. J. Dickrell, III and M. T. Dugger, "The effects of surface contamination on resistance degradation of hot-switched low-force MEMS electrical contacts," in Proc. 51st IEEE Holm Conf. Electr. Contacts 2005, 2005, pp. 255-258.
11. G. Norberg, S. Dejanovic, and H. Hesselbom, "Contact resistance of thin metal film contacts," IEEE Trans. Compon. Packag. Technol., vol. 29, no. 2, pp. 371-378, 2006.
12. J. W. McBride, "The loaded surface profile: A new technique for the investigation of contact surfaces," in Proc. Int. Conf. Electr. Contacts 2006, 2006, pp. 150-156.
13. R. A. Coutu, Jr., J. R. Reid, R. Cortez, R. E. Strawser, and P. E. Kladitis, "Microswitches with sputtered Au, AuPd, Au-on-AuPt, and AuPtCu alloy electric contacts," IEEE Trans. Compon. Packag. Technol., vol. 29, no. 2, pp. 341-349, 2006.
14. S. T. Patton and J. S. Zabinski, "Fundamental studies of Au contacts in MEMS RF switches," Tribol. Lett., vol. 18, no. 2, pp. 215-230, 2005.
15. D. Hyman and M. Mehregany, "Contact physics of gold microcontacts for MEMS switches," IEEE Trans. Compon. Packag. Technol., vol. 22, pp. 357-364, 1999.
16. J. Tringe, W. G. Wilson, and J. E. Houston, "Conduction properties of microscopic gold contact surfaces Source," in Proc. SPIE, 2001, vol. 4558, pp. 151-158.
17. W. Chang, "An elastic-plastic model for a rough surface with an ion-plated metallic coating," J. Wear, vol. 212, pp. 229-237, 1997.
18. W. R. Chang, I. Etsion, and D. B. Bogy, "An elastic-plastic model for the contact of rough surfaces," Trans. ASME J. Tribol., vol. 109, no. 2, pp. 257-263, 1987.
19. A. Mikrajuddin, F. G. Shi, H. K. Kim, and K. Okuyama, "Size-dependent electrical constriction resistance for contacts of arbitrary size: From Sharvin to Holm limits," Mater. Sci. Semicond. Process., vol. 2, no. 4, pp. 321-327, 1999.
20. N. Agrait, A. L. Yeyati, and J. M. van Ruitenbeek, "Quantum properties of atomic-sized conductors," Phys. Rep., vol. 377, no. 2-3, pp. 81-279, 2003.
21. G.Wexler, "The size effect and the nonlocal Boltzmann transport equation in orifice and disk geometry," in Proc. Phys. Soc., 1966, vol. 89, pp. 927-941.
22. R. S. Timsit, "Electrical conduction through small contact spots," IEEE Trans. Compon. Packag. Technol., vol. 29, no. 4, pp. 727-734, 2006.
23. G. Gregori and D. R. Clarke, "The interrelation between adhesion, contact creep, and roughness on the life of gold contacts in radio-frequency microswitches," J. Appl. Phys., vol. 100, p. 094904-1/10, 2006.
24. J. Schimkat, "Contact measurements providing basic design data for microrelay actuators," Sens. Actuators A (Phys.), vol. A73, no. 1-2, pp. 138-143, 1999.