The fabrication of metallic tips with a silicon cantilever for probe-based ferroelectric data storage and their durability experiments

Nanotechnology

Volumn 20, Issue 36, 2009, Pages

  Takahashi, Hirokazu ^a   Mimura, Yasuhiro ^a   Mori, Shuntaro ^a   Ishimori, Masahiro ^a   Onoe, Atsushi ^a   Ono, Takahito ^b   Esashi, Masayoshi ^b  

^a PIONEER CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CVD DIAMOND; DATA BITS; FERROELECTRIC DATA STORAGE; METALLIC TIPS; PROBE-BASED; SCANNING NONLINEAR DIELECTRIC MICROSCOPY; SILICON CANTILEVER; TIP WEAR; ULTRAHIGH DENSITY;

CHEMICAL VAPOR DEPOSITION; CHROMIUM; DATA STORAGE EQUIPMENT; DIELECTRIC DEVICES; DURABILITY; EXPERIMENTS; FERROELECTRIC MATERIALS; FERROELECTRICITY; NANOCANTILEVERS; PLATINUM; RUTHENIUM;

PROBES;

CHROMIUM; DIAMOND; LITHIUM DERIVATIVE; METAL; PLATINUM; RUTHENIUM; SILICON; TANTALUM;

ARTICLE; EXPERIMENT; INFORMATION PROCESSING; INFORMATION TECHNOLOGY; MATERIALS TESTING; MICROSCOPY; PRIORITY JOURNAL;

EID: 70349160021     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/36/365201     Document Type: Article

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