Investigation of an atomic force microscope diamond tip wear in micro/nano-machining

Key Engineering Materials

Volumn , Issue 202-203, 2001, Pages 315-320

  Zhao, Q L ^a   Dong, S ^a   Sun, T ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope; Chemical wear; Diamond tip; Micro nano machining; Single crystal silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; FORCE MEASUREMENT; MICROMACHINING; SILICON; SINGLE CRYSTALS; STRESS ANALYSIS; WEAR RESISTANCE;

CHEMICAL WEAR; NANOMACHINING;

DIAMOND CUTTING TOOLS;

EID: 0034968811     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

References (6)

1. S.Z. Wen: Nano-tribology (Tsing Hua University Press, China, 1998)
2. C.M. Mate: Wear, Vol. 163 (1993), pp. 17ff
3. T. Miyamoto: T. Yokohata, S. Miyake, D.B. Bogy, et al: ASME, J. Tribol, Vol. 117 (1995), pp. 612ff.
4. C.M. Mate: Wear, Vol. 163 (1993), pp. 17ff.
5. J.N. Lee: Harbin Institute of Technology, (1987), pp. 40ff
6. Q.L. Zhao: Harbin Institute of Technology, (1999).