Encapsulated tips for reliable nanoscale conduction in scanning probe technologies

Nanotechnology

Volumn 20, Issue 10, 2009, Pages

  Bhaskaran, Harish ^a   Sebastian, Abu ^a   Drechsler, Ute ^a   Despont, Michel ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER PROBES; DATA STORAGES; LONG-TERM OPERATIONS; NANO METROLOGIES; NANO-SCALE; NANOSCALE TIPS; PROBE TECHNOLOGIES; PROBE-BASED; SCANNING PROBES; SILICON MICROCANTILEVERS; SLIDING DISTANCES; TIP APICES;

AMORPHOUS CARBON; PROBES;

NANOSTRUCTURED MATERIALS;

NANOMATERIAL; SILICON DIOXIDE;

ARTICLE; ENCAPSULATION; NANOANALYSIS; NANOIMAGING; PRIORITY JOURNAL; RELIABILITY; SCANNING ELECTRON MICROSCOPY; ELECTRIC CONDUCTIVITY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; METHODOLOGY; MICROELECTRODE; MICROELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY; SCANNING PROBE MICROSCOPY; TRANSDUCER;

ELECTRIC CONDUCTIVITY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MICROELECTRODES; MICROSCOPY, SCANNING PROBE; NANOTECHNOLOGY; TRANSDUCERS;

EID: 65549096866     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/10/105701     Document Type: Article

References (21)

1. Binnig G, Despont M, Drechsler U, Häberle W, Lutwyche M, Vettiger P, Mamin H J, Chui B W and Kenny T W 1999 Ultra-high density atomic force microscopy data storage with erase capability Appl. Phys. Lett. 74 1329
2. Vettiger P et al 2002 IEEE Trans. Nanotechnol. 1 39
3. Wiesmann D, Dürig U, Gotsmann B, Knoll A, Pozidis H, Porro F and Vecchione R 2007 Ultra-high storage densities with thermo-mechanical probes and polymer media Proc. Innovative Mass Storage Technologies Workshop pp 19-20 see http://imst2007.ewi.utwente.nl/imst-program.pdf
4. -2 densities Nanotechnology 19 395305
5. Sebastian A and Wiesmann D 2008 Modeling and experimental identification of silicon microheater dynamics: a systems approach J. Microelectromech. Syst. 17 911-20
6. Oesterschulze E, Scholz W, Mihalcea Ch, Albert D, Sobisch B and Kulisch W 1997 Fabrication of small diamond tips for scanning probe microscopy application Appl. Phys. Lett. 70 435
7. Takahashi H, Ono T, Onoe A, Cho Y and Esashi M 2006 A diamond-tip probe with silicon based piezoresistive strain gauge for high-density data storage using scanning nonlinear dielectric microscopy J. Micromech. Microeng. 16 1620-4 (Pubitemid 44102312)
8. Sahoo D R, Haeberle W, Baechtold P, Sebastian A, Pozidis H and Eleftheriou E 2008 On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors Proc. 2008 American Control Conf. (Westin Seattle Hotel, Seattle, WA) pp 2034-39
9. Kado H and Tohda T 1997 Japan. J. Appl. Phys. 36 1
10. Gidon S, Lemonnier O, Rolland B, Bichet O, Dressler C and Samson Y 2004 Electrical probe storage using Joule heating in phasechange media Appl. Phys. Lett. 85 6392
11. Wright D, Armand M and Aziz M M 2006 IEEE Trans. Nanotechnol. 5 1
12. Bhaskaran H, Sebastian A and Despont M 2009 IEEE Trans. Nanotechnol. 8 128-31
13. Akiyama T, Gullo M R, de Rooij N F, Tonin A, Hidber H-R, Patrick L T, Frederix T M, Engel A and Staufer U 2004 Japan. J. Appl. Phys. 43 6
14. Tayebi N, Narui Y, Chen R J, Collier P C, Giapis K P and Zhang Y 2008 Nanopencil as a wear-tolerant probe for ultrahigh density data storage Appl. Phys. Lett. 93 103112
15. Oliver R A 2008 Rep. Prog. Phys. 71 076501
16. Despont M et al 2000 VLSI-NEMS chip for AFM data storage Sensors Actuators A 80 100-7
17. Archard J F 1953 Contact and rubbing of flat surfaces J. Appl. Phys. 24 981-8
18. Briscoe B J and Evans D C B 1982 Proc. R. Soc. A 380 389
19. Gotsmann B and Lantz M A 2008 Phys. Rev. Lett. 101 125501
20. Bhushan B 2002 Introduction to Tribology (New York: Wiley)
21. Friedmann T A, Sullivan J P, Knapp J A, Tallant D R, Follstaedt D M, Medlin D L and Mirkarimi P B 1997 Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond Appl. Phys. Lett. 71 3820