Enhancement of EUV emission intensity from particles in a droplet by exploding the droplet

Journal of Physics D: Applied Physics

Volumn 42, Issue 15, 2009, Pages

  Lin, Jingquan ^a,b   Tomie, Toshihisa ^b  

^a CHANGCHUN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EUV EMISSIONS; EXPANSION VELOCITY; EXPLOSIVE VAPORIZATION; EXTREME ULTRAVIOLET EMISSION; LASER ENERGY ABSORPTION; LASER PLASMA; PREPULSES; SINGLE LASER PULSE; WATER BLOCKS; WATER DROPLETS;

BORON; BORON NITRIDE; DROP FORMATION; LASER PULSES; LASERS; NITRIDES; PHOTOLITHOGRAPHY; ULTRAVIOLET DEVICES; WATER VAPOR;

PULSED LASER APPLICATIONS;

EID: 70249133360     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/15/155203     Document Type: Article

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