Extreme high resolution scanning electron microscopy (XHR SEM) and beyond

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7378, Issue , 2009, Pages

  Roussel, Laurent Y ^a   Stokes, Debbie J ^a   Gestmann, Ingo ^a   Darus, Mark ^a   Young, Richard J ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

Low voltage; Monochromator; Resolution; Scanning electron microscope; SEM; STEM; Transmission

Indexed keywords

LOW VOLTAGE; RESOLUTION; SCANNING ELECTRON MICROSCOPE; SEM; STEM;

ELECTRON MICROSCOPES; ELECTRONS; HEADLIGHTS; MONOCHROMATORS; RADIATION DAMAGE; SCANNING; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 69949177852     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.821826     Document Type: Conference Paper

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