Adopting low-voltage STEM and automated sample prep to perform IC failure analysis

MICRO

Volumn 22, Issue 6, 2004, Pages 87-96

  Tracy, Bryan ^a,b   Alberi, Kirstin ^a   Tabrez, Shams ^a  

^a Spansion ^*  (United States)

^b Submicron Development Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM ENERGIES; CONVENTIONAL THIN-SECTIONING TECHNIQUES; LOW-ENERGY ELECTRONS; SCANNING TRANSMISSION ELECTRON MICROSCOPY (STEM);

AUTOMATION; ELECTRON BEAMS; ELECTRON SCATTERING; FAILURE ANALYSIS; FLUORESCENCE; IMAGE ANALYSIS; ION BEAMS; RELIABILITY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES; STRAIN; TRANSMISSION ELECTRON MICROSCOPY;

INTEGRATED CIRCUITS;

EID: 3142690009     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (0)