Hydrogen desorption from 6H-SiC(0001) surfaces during graphitization

Applied Physics Letters

Volumn 95, Issue 9, 2009, Pages

  Aoki, Yuki ^a   Hirayama, Hiroyuki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION SITE; DESORPTION OF HYDROGEN; HIGH TEMPERATURE; HYDROGEN DESORPTION; LOW ENERGIES;

ADSORPTION; GRAPHITE; GRAPHITIZATION; HYDROGEN; SILICON CARBIDE; SURFACE CHEMISTRY; SURFACE STRUCTURE; THERMAL DESORPTION; VACUUM;

AUGER ELECTRON SPECTROSCOPY;

EID: 69949165334     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3223598     Document Type: Article

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