Oxidation of clean and H-terminated SiC surfaces

Materials Science and Engineering B

Volumn 46, Issue 1-3, 1997, Pages 366-369

  Van Elsbergen, Volker ^a   Janzen, Oliver ^a   Mönch, Winfried ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

H terminated; SiC surfaces; X ray photoelectron spectroscopy

Indexed keywords

CHEMISORPTION; HYDROGEN; OXIDATION; OXYGEN; PYROLYSIS; SURFACE CLEANING; SURFACE STRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

INVERSE LOGARITHMIC GROWTH; SURFACE RECONSTRUCTION;

SILICON CARBIDE;

EID: 0003027841     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5107(96)02007-7     Document Type: Article

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