Magnetic debris mitigation of a CO2 laser-produced Sn plasma

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6921, Issue , 2008, Pages

  Ueno, Yoshifumi ^a   Soumagne, Georg ^a   Moriya, Masato ^a   Suganuma, Takashi ^a   Abe, Tamotsu ^a   Komori, Hiroshi ^a   Endo, Akira ^a   Sumitani, Akira ^a  

^a Extreme Ultra Violet Lithography System Development Association   (Japan)

Author keywords

CO2 laser; Debris; Extreme ultraviolet lithography; Laser produced plasma; Magnetic field; Sn

Indexed keywords

DEBRIS MITIGATION; DEBRIS PARTICLES; EXTREME ULTRAVIOLET; FARADAY CUPS; ION FLUXES; LAYER DEPOSITION; MO/SI MULTILAYER; ORDERS OF MAGNITUDE;

CARBON DIOXIDE; DEBRIS; DEPOSITION RATES; EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PRODUCED PLASMAS; MAGNETIC FIELDS; MAGNETOPLASMA; MIRRORS; MULTILAYERS; PLASMA DEPOSITION;

TIN;

EID: 67149086444     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.771817     Document Type: Conference Paper

References (8)

1. Akira Endo, Hideo Hoshino, Takashi Suganuma, Masato Moriya, Tatsuya Ariga, Yoshifumi Ueno, Masaki Nakano, Takeshi Asayama, Tamotsu Abe, Hiroshi Komori, Georg Soumagne, Hakaru Mizoguchi, Akira Sumitani and Koichi Toyoda, "Laser Produced Plasma EUV Light Source Development for HVM", Proc. of SPIE Vol.6517, 65170O, (2007).
2. Yoshifumi Ueno*, Hideo Hoshino, Tatsuya Ariga, Taisuke Miura, Masaki Nakano, Hiroshi Komori, Georg Soumagne, Akira Endo, Hakaru Mizoguchi, Akira Sumitani and Koichi Toyoda, "Characterization of Various Sn Targets with Respect to Debris and Fast Ion Generation", Proc. of SPIE Vol.6517, 65173B, (2007).
3. R. Stuik, F. Scholze, J. Tummler, and F. Bijkerk, Nucl. Instrum. Methods Phys. Res. A 492, 305 (2002).
4. K. Takenoshita, C-S. Koay, S. Teerawattanasook, and M. Rihardson, Proc. of SPIE Vol.5374, pp.954-963, (2004).
5. M. Richardson, C.-S. Koay, K. Takenoshita, C. Keyser and M. Al-Rabban, J. Vac. Sci. Technol. B 22(2), pp.785-790, Mar/Apr 2004.
6. J. F. Ziegler, J. P. Biersack, U. Littmark, "The Stopping and Range of Ions in Solids, Pergamon Press, New York, (1985).
7. http://www.srim.org.
8. A. Fontell and E. Arminen, Can.J.Phys., 47(21), 2405 (1969).