Laser patterning of ITO in flat panel display manufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6106, Issue , 2006, Pages

  Venkat, Sri ^a   Dunsky, Corey ^a  

^a Research and Development Department   (United States)

Author keywords

Diode pumped solid state laser; Excimer laser; FPD; ITO; LCD; Patterning; PDF

Indexed keywords

ETCHING; LASER ABLATION; LASER APPLICATIONS; LIQUID CRYSTAL DISPLAYS; PHOTOLITHOGRAPHY; PHOTORESISTORS; TRANSPARENCY;

DIODE-PUMPED SOLID-STATE LASER; FPD; ITO; PATTERNING; PDF;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 33646595970     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.653598     Document Type: Conference Paper

References (5)

1. Displaysearch Conference. Current Status and Outlook for FPD Manufacturing. September 14-15, 2005
2. Samsung Press Release. FPD International. Yokohama, Japan. Oct 2005.
3. http://www.exitech.co.uk/
4. Microfabrication of an electroluminescent polymer light emitting diode pixel array. Salman Noach Nanonics Lithography LTD, Jerusalem, Israel 91487. Appl. Phys. Lett. 69 (24), 9 December 1996
5. Excimer laser patterning of thick and thin films for high density packaging. Phil Rumsby, Exitech Ltd, UK. Photonics West 1997 Invited Paper.