Development of DPSS-laser-based ITO patterning system for large-scale FPD's (invited paper)

ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2006, Pages

  Fukuda, Naoaki ^a  

^a HITACHI ZOSEN CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLAT PANEL DISPLAYS; INDIUM; LASERS; MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR LASERS; TIN; TITANIUM COMPOUNDS;

COLOR FILTERS; ENVIRONMENTAL CONCERNS; ENVIRONMENTAL PROBLEMS; ETCHING PROCESSES; GLASS SUBSTRATES; HITACHI; INDIUM TIN OXIDE FILMS; ITO FILMS; LOW COSTS; MANUFACTURING ENVIRONMENTS; MANUFACTURING PROCESSES; PANEL PRODUCTIONS; PATTERNING METHODS; PROCESSING METHODS; SEMICONDUCTOR SUBSTRATES;

SUBSTRATES;

EID: 56749102699     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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