The applications of in situ electron energy loss spectroscopy to the study of electron beam nanofabrication

Microscopy and Microanalysis

Volumn 15, Issue 3, 2009, Pages 204-212

  Chen, Shiahn J ^a   Howitt, David G ^b   Gierhart, Brian C ^a   Smith, Rosemary L ^a   Collins, Scott D ^a  

^a UNIVERSITY OF MAINE   (United States)

^b University of California   (United States)

Author keywords

In situ EELS; Nanofabrication; Nanopore; Silicon nitride

Indexed keywords

EID: 69849090967     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927609090345     Document Type: Article

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