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Volumn 518, Issue 1, 2009, Pages 290-294
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Preparation and optical properties of sol-gel derived photo-patternable organic-inorganic hybrid films for optical waveguide applications
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Author keywords
Hybrid film; Optical properties; Optical waveguides; Photo patterning; Sol gel deposition
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Indexed keywords
BINARY MASKS;
COATING PROCESS;
EXPOSURE-TIME;
FABRICATION PROCESS;
HYBRID FILM;
LOW TEMPERATURES;
ORGANIC-INORGANIC HYBRID FILMS;
ORGANICALLY MODIFIED SILANES;
PHOTO-PATTERNING;
PHOTOCHEMICAL ACTIVITY;
PHOTOSENSITIVE MATERIALS;
POTENTIAL APPLICATIONS;
PRISM COUPLING TECHNIQUE;
PROPAGATION LOSS;
PROPAGATION MODE;
RIDGE WAVEGUIDES;
SCANNING ELECTRON MICROSCOPE;
SMOOTH SURFACE;
SOL-GEL DEPOSITION;
SOL-GEL TECHNIQUE;
SURFACE PROFILERS;
TIO;
ULTRAVIOLET LIGHT IRRADIATION;
FABRICATION;
FILM PREPARATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GELATION;
GELS;
INTEGRATED OPTOELECTRONICS;
IRRADIATION;
LIGHT SENSITIVE MATERIALS;
LIGHT TRANSMISSION;
OPTICAL WAVEGUIDES;
ORGANIC POLYMERS;
PHOTOSENSITIVITY;
REFRACTIVE INDEX;
SCANNING ELECTRON MICROSCOPY;
SILANES;
SOL-GEL PROCESS;
SOL-GELS;
SOLS;
SPECTROSCOPIC ANALYSIS;
ULTRAVIOLET RADIATION;
ULTRAVIOLET SPECTROSCOPY;
ULTRAVIOLET VISIBLE SPECTROSCOPY;
WAVEGUIDES;
OPTICAL FILMS;
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EID: 69549124127
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2009.06.026 Document Type: Article |
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Times cited : (20)
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References (19)
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