High temperature smart-cut SOI pressure sensor

Sensors and Actuators, A: Physical

Volumn 154, Issue 2, 2009, Pages 255-260

  Guo, Shuwen ^a   Eriksen, Harald ^a   Childress, Kimiko ^a   Fink, Anita ^a   Hoffman, Mary ^a  

^a GOODRICH CORPORATION   (United States)

Author keywords

High temperature; Piezoresistive sensor; Pressure sensor; Silicon; Smart cut SOI

Indexed keywords

ANALYTICAL MODEL; BULK SILICON; DIGITIZED CURVES; DOPING EFFECTS; HEAVILY DOPED; HIGH PRESSURE; HIGH TEMPERATURE; HIGH-TEMPERATURE ENVIRONMENT; LOW PRESSURES; MAXIMUM TEMPERATURE; ON-CHIP TEMPERATURE; OPERATING TEMPERATURE; PIEZORESISTIVE PRESSURE SENSORS; PIEZORESISTIVE SENSOR; RESISTANCE VALUES; SINGLE CRYSTAL SILICON; SMART-CUT; SMART-CUT SOI; SOI WAFERS;

CURVE FITTING; DOPING (ADDITIVES); HIGH TEMPERATURE APPLICATIONS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; RESISTORS; SINGLE CRYSTALS;

SILICON WAFERS;

EID: 69549103089     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.011     Document Type: Article

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